Ceramic Heater Thermocouple Passage for Heat Loss and Crack Control
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Solution Overview
Problem
Ceramic heaters used in manufacturing processes for flat panel displays and semiconductor devices face issues of heat loss, temperature uniformity deterioration, and potential cracks due to the insertion of temperature sensors and expansion/contraction of heat-generation bodies.
Innovation Solution
The ceramic heater design includes a plate with a heat-generation body and a first passage that has an A-th passage part parallel to the plate's surface and a B-th passage part inclined towards the heat-generation body, minimizing heat loss and crack occurrence by positioning the temperature sensor away from heat-concentrated areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a thermocouple passage is disposed inside the ceramic heater plate, then temperature measurement is enabled, but heat loss occurs and temperature uniformity deteriorates
Solution Approach 1:
The passage is positioned in a localized region away from the heat-generation body, creating a specific zone for temperature sensing that does not interfere with the main heating area. This local differentiation allows temperature measurement while preserving heat distribution in the critical heating zones.
Solution Approach 2:
The passage serves as an intermediary channel that allows the thermocouple to access temperature information from the heating region without creating a direct heat loss pathway. By positioning it away from the heat-generation body, it mediates between measurement needs and heat conservation.
2Measurement precision
If a thermocouple passage is disposed inside the ceramic heater plate, then temperature measurement is enabled, but cracks may occur due to expansion and contraction of heat-generation body
Solution Approach 1:
The passage is strategically positioned in a region that experiences different thermal stress characteristics compared to the heat-generation body. By locating it away from the heat-generation body, the passage is placed in a zone with reduced thermal expansion and contraction, thereby minimizing crack risk while maintaining measurement capability.
3Measurement precision
If the passage is positioned close to the heat-generation body, then temperature measurement accuracy is improved, but heat loss and crack risk increase
Solution Approach 1:
The position parameter of the passage is optimized to achieve the right balance. By changing the spatial parameter (positioning away from heat-generation body), the system achieves acceptable temperature measurement accuracy while significantly reducing heat loss and crack risk associated with proximity to the heat-generation body.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively prevents heat loss and cracks, allows for more accurate temperature measurement, and simplifies the insertion of temperature sensors, thereby enhancing the temperature uniformity and durability of the ceramic heater.
Implementation Method 1
A ceramic heater used as the substrate heating device includes a heat-generation body
Implementation Method 2
a thermocouple to measure a temperature of the heat-generation body
Data Source
AI summary
An embodiment of the present disclosure provides a ceramic heater including a plate having a heat-generation body and a first passage, a shaft having a hollow, and a thermocouple inserted into the first passage, wherein the first passage includes an A-th passage part parallel with a first surface of the plate and a B-th passage part inclined with respect to the first surface. Furthermore, an embodiment of the present disclosure provides a ceramic heater including a plate having a heat-generation body and a first passage, a shaft having a hollow, and a thermocouple inserted into the first passage, wherein the first passage includes an A-th passage part parallel with an upper surface of the plate, and a C-th passage part disposed between the A-th passage part and an upper end portion of the shaft and gradually narrowing from the upper end portion of the shaft to the A-th passage.