Ceramic Heater Sensor Passage Placement
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Solution Overview
Problem
Ceramic heaters used in substrate heating for manufacturing processes face issues such as heat loss and cracking due to the passage for temperature sensors, which also affects temperature uniformity and measurement accuracy.
Innovation Solution
The ceramic heater design includes a plate with a heating element and a first passage for the temperature sensor, positioned in an area where the heating element is not densely packed, along with a shaft having a hollow portion for the sensor, minimizing heat loss and allowing for accurate temperature measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a thermocouple passage is formed inside the ceramic heater to measure temperature, then temperature measurement capability is improved, but heat loss increases and temperature uniformity deteriorates
Solution Approach 1:
The patent extracts the temperature sensor from the interior of the heating element and relocates it to the peripheral region. The thermocouple is positioned in a groove formed at the periphery of the heating element, separate from the densely packed heating coils in the center. This extraction eliminates the heat loss problem caused by having the sensor passage within the heating element while maintaining temperature measurement capability through thermal conduction from the peripheral region to the sensor.
2Measurement precision
If a thermocouple passage is formed inside the ceramic heater to measure temperature, then temperature measurement capability is improved, but temperature uniformity of the substrate deteriorates
Solution Approach 1:
The temperature sensor is extracted from the central heating region and positioned at the periphery where it does not disrupt the uniform heat distribution. The sensor groove is formed in the peripheral region of the heating element, allowing temperature measurement without creating holes or passages through the densely packed heating coils that would compromise temperature uniformity.
Solution Approach 2:
The patent introduces a peripheral region as an intermediary zone between the heating element and the temperature sensor. This peripheral groove acts as a mediator that conducts heat from the heating element to the temperature sensor positioned at the periphery, enabling accurate temperature measurement without the sensor being directly embedded in the heating coils, thus maintaining temperature uniformity.
3Measurement precision
If the temperature sensor is positioned close to the heating element for accurate measurement, then measurement accuracy is improved, but heat loss through the sensor passage increases
Solution Approach 1:
The patent applies local quality by creating a specific peripheral groove structure only where needed for sensor placement, rather than forming passages through the entire heating element. The groove is localized to the peripheral region where heating density is lower, allowing the temperature sensor to be positioned close enough to the heating element for accurate measurement while avoiding high heat loss zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design prevents heat loss and cracking, enhances temperature uniformity, and allows for more accurate temperature measurement of the heating element, while providing design flexibility for the placement of the temperature sensor.
Implementation Method 1
The ceramic heater used as such a substrate heating device includes a heating element and a thermocouple for measuring the temperature of the heating element
Implementation Method 2
The thermocouple is inserted into a thermocouple passage formed inside the ceramic heater, and heat generated from the heating element may be released through the thermocouple passage
Data Source
AI summary
Disclosed is a ceramic heater. The ceramic heater includes a plate including a heating element and a first passage, and a shaft having a hollow portion. The heating element includes a plurality of concentric arc portions and a plurality of connecting portions connecting the arc portions. The plurality of connecting portions are spaced apart and face each other to form a separation area that extends in a radial direction of the plate, and the first passage is formed adjacent to the separation area.