Ceramic Heater Sub Element for Thermal Uniformity
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Solution Overview
Problem
Ceramic heaters used in semiconductor manufacturing with coil resistance heating elements face challenges in achieving thermal uniformity due to the need for spacing around gas holes and lift pin holes, leading to temperature singularities.
Innovation Solution
Incorporating a sub resistance heating element with a two-dimensional shape, which can be manufactured by printing, to complement the main coil resistance heating element, allowing for more flexible wiring and improved thermal uniformity by bridging curved portions and areas around holes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If coil resistance heating elements are used, then heat generation capability is achieved, but thermal uniformity deteriorates due to spacing requirements around holes
Solution Approach 1:
The heating element is divided into two distinct parts: a main coil resistance heating element for overall heat generation and a sub resistance heating element with two-dimensional shape for filling gaps and improving thermal uniformity around holes. This segmentation allows each part to perform its specialized function effectively.
Solution Approach 2:
Different regions of the heating system are assigned different heating characteristics. The main coil provides bulk heating while the sub element provides localized heating in critical areas around gas holes and lift pin holes, creating non-uniform heat distribution that compensates for the uniformity defects of the coil alone.
2Power
If coil resistance heating elements are used, then heat generation is achieved, but wiring flexibility is restricted due to detour requirements around holes
Solution Approach 1:
The heating system is segmented into a main coil element and a sub element, where the sub element can be independently positioned and wired in two-dimensional patterns around holes, providing wiring flexibility that the constrained coil cannot achieve.
Solution Approach 2:
The sub resistance heating element is designed with a two-dimensional shape that can be printed or deposited on the substrate surface, allowing it to wrap around holes and adapt to complex geometries in ways that a linear coil cannot, thereby achieving high wiring flexibility.
3Temperature
If sub resistance heating element with two-dimensional shape is added, then thermal uniformity is improved, but device complexity increases
Solution Approach 1:
The main coil resistance heating element and the sub resistance heating element are combined into a single integrated heating system. The sub element is positioned to work in conjunction with the main coil, and both can be controlled through the same or separate terminals to achieve uniform heating without requiring completely independent systems.
Solution Approach 2:
The sub resistance heating element serves multiple functions: it fills thermal gaps around holes, compensates for coil spacing deficiencies, and can be positioned to address specific thermal uniformity issues. This multi-functionality justifies the added structural complexity by providing comprehensive thermal control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sub resistance heating element enhances thermal uniformity by reducing temperature singularities around holes and curved areas, enabling effective heating control and increased heat generation in critical regions.
Implementation Method 1
a main resistance heating element that is disposed parallel with the wafer placement surface in the ceramic plate, that is wired from one of a pair of main terminals in a one-stroke pattern, that reaches the other of the pair of main terminals, and that has a coil shape; and a sub resistance heating element that is disposed in the ceramic plate, that complements heating with the main resistance heating element
Data Source
AI summary
A ceramic heater includes a ceramic plate, a main resistance heating element, and a sub resistance heating element. The main resistance heating element is a coil that is disposed in the ceramic plate, that is wired from one of a pair of main terminals in a one-stroke pattern, and that reaches the other of the pair of the main terminals. The sub resistance heating element is a heating element that is disposed in the ceramic plate, that complements heating with the main resistance heating element, and that has a two-dimensional shape.