Ceramic Heater Connection Terminal via Plate-Like Member
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Solution Overview
Problem
Existing semiconductor wafer heating apparatuses face challenges in maintaining long-term reliability of electrical connections between the connection terminal and the conductive layer due to varying pressing forces under heat cycles, which can lead to damage or failure of the connection.
Innovation Solution
A heater design featuring a ceramic base body with a heat generating resistor layer, a conductive layer, and a plate-like member with through holes for securing the connection terminal, which is electrically connected to the conductive layer, enhancing the reliability of the electrical connection by reducing thermal stress and improving adhesion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the connection terminal is pressed against the conductive layer to establish electrical connection, then electrical connection is achieved, but the long-term reliability deteriorates due to pressing force variation under heat cycles
Solution Approach 1:
The connection terminal is divided into multiple wires that are inserted through separate through-holes in the plate-like member. This segmentation allows each wire to be independently positioned and connected, distributing the mechanical stress and reducing the impact of pressing force variation on the overall electrical connection reliability.
Solution Approach 2:
The plate-like member with through-holes serves as an intermediary component between the connection terminal wires and the conductive layer. It provides a stable mounting structure that maintains consistent electrical connection without requiring direct pressing force between the terminal and conductive layer, thereby improving reliability under heat cycles.
2Reliability
If great pressing force is applied between connection terminal and conductive layer, then electrical connection is maintained, but damage occurs to the connection terminal or conductive layer
Solution Approach 1:
The plate-like member with through-holes is installed beforehand to provide a cushioning effect. It absorbs and distributes the mechanical stress, preventing excessive pressing force from being directly transmitted to the connection terminal wires and conductive layer, thereby protecting them from damage while maintaining electrical connection.
3Strength
If small pressing force is applied between connection terminal and conductive layer, then structural damage is avoided, but electrical connection fails
Solution Approach 1:
The plate-like member acts as an intermediary that ensures reliable electrical connection without requiring excessive pressing force. The through-holes provide precise positioning and stable mechanical support for the connection terminal wires, maintaining consistent electrical contact through structural stability rather than relying on high pressing force.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design significantly improves the long-term reliability of the electrical connection between the connection terminal and the conductive layer, reducing the risk of damage and failure, while maintaining thermal uniformity and efficiency in heating semiconductor wafers.
Implementation Method 1
a heat generating resistor layer (5) laminated on the insulating layer (4)... The heating resistor is electrically connected to a rod-like electrically conductive terminal (connection terminal) via a feeder portion (conductive layer)
Data Source
AI summary
A heater includes: a base body formed of ceramics; a heat generating resistor layer disposed on a surface of the base body; a conductive layer laminated on the heat generating resistor layer; a plate-like member which is disposed on the conductive layer and is provided with a pair of through holes; and a connection terminal composed of wires which are inserted successively through one of the pair of through holes and the other and are unified at a side of the plate-like member which side is opposite to a side of the plate-like member facing the conductive layer, the connection terminal being electrically connected with the conductive layer.