Ceramic Joined Body Structure for Electrostatic Chuck Breakdown Prevention
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Solution Overview
Problem
Existing methods for manufacturing ceramic joined bodies for electrostatic chuck devices result in increased manufacturing steps and costs, and there is a risk of breakdown due to fine gaps and protrusions in the interface, which can decrease the withstand voltage.
Innovation Solution
A ceramic joined body design with a gap between the electrode layer and joining layer, where the joining layer and at least one ceramic plate are composed of a composite of insulating and conductive materials, with a conductive material content ratio of 3-12% by mass, and an inclined inner edge of the joining layer, to distribute charge uniformly and prevent breakdown.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the amount of paste for formation of electrode layer is increased to fill the recess portion and remove gaps, then the withstand voltage may improve, but the paste protrudes from the recess portion causing breakdown of the ceramic joined body
Solution Approach 1:
The invention applies different properties to different regions: the electrode layer is made conductive for electrical function, while the joining layer is made insulating to prevent discharge. This local differentiation of material properties allows the system to achieve both good electrical contact and prevention of harmful protrusion effects.
Solution Approach 2:
The invention uses composite materials with distinct characteristics - a conductive electrode layer for electrical connection and an insulating joining layer for structural bonding and discharge prevention. This composite approach resolves the contradiction by assigning different functional roles to different material layers.
2Ease of manufacture
If a fine gap remains in the interface between the ceramic plate and electrode side surface, then the manufacturing process is simpler, but the withstand voltage of the ceramic joined body decreases
Solution Approach 1:
The joining layer acts as an intermediary between the electrode layer and the ceramic plate. It fills the recess portion and provides a stable insulating barrier that prevents discharge, while allowing the electrode layer to maintain good electrical contact with the ceramic plate without requiring complete gap elimination.
3Ease of manufacture
If the ceramic plate and electrode layer are joined through a silicone adhesive, then the assembly is simple, but the number of manufacturing steps increases and the cost increases
Solution Approach 1:
The invention merges the joining function and the insulating function into a single joining layer. This layer simultaneously bonds the electrode to the ceramic plate and provides electrical insulation, eliminating the need for separate adhesive layers and reducing manufacturing steps.
Solution Approach 2:
The joining layer serves multiple functions: it provides mechanical bonding between components, electrical insulation to prevent discharge, and structural support. This multi-functionality reduces the total number of components and manufacturing steps required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design suppresses electrode layer protrusions and charge concentration, enhancing the withstand voltage and maintaining temperature uniformity, thereby preventing breakdown during high voltage application.
Implementation Method 1
the joining layer and at least one of the pair of ceramic plates are formed of a composite of an insulating material and a conductive material... distribute charge uniformly and prevent breakdown
Implementation Method 2
a plate-shaped sample such as a silicon wafer is fixed to an electrostatic chuck member having an electrostatic chuck function by electrostatic adsorption
Implementation Method 3
the coolant for temperature adjustment is circulated for heat exchange to the flow path of the base member for temperature adjustment such that electrostatic adsorption can be performed while maintaining the temperature
Data Source
AI summary
A ceramic joined body includes: a pair of ceramic plates; an electrode layer that is interposed between the pair of ceramic plates; and a joining layer that is disposed in a periphery of the electrode layer between the pair of ceramic plates, in which at least one of the pair of ceramic plates and the joining layer is formed of a composite of an insulating material and a conductive material, a gap is provided between an outer edge of the electrode layer and an inner edge of the joining layer, and a content ratio of the conductive material in the at least one of the pair of ceramic plates and the joining layer is 3% by mass or more and 12% by mass or less.