Ceramic Joined Body Structure to Prevent Electrostatic Chuck Breakdown
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Solution Overview
Problem
The existing electrostatic chuck devices experience breakdown (discharge) at the joint interface between the composite dielectric ceramic and the internal electrode due to exposed conductive paths, compromising insulation characteristics.
Innovation Solution
A ceramic joined body is constructed with a pair of ceramic plates, a conductive layer, and insulating layers, with specific thickness ratios and materials to prevent breakdown, using a production method involving paste application and pressurization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the joint surfaces of composite dielectric ceramic and internal electrode are joined after polishing, then the joining process is simplified, but exposed conductive paths form at the interface causing breakdown
Solution Approach 1:
An insulating layer is introduced as an intermediary substance between the composite dielectric ceramic and the internal electrode. This insulating layer fills the gaps and prevents direct contact between conductive surfaces, eliminating the formation of conductive paths while maintaining the simplicity of the joining process.
Solution Approach 2:
The insulating layer is applied specifically at the joint interface where insulation is needed, rather than modifying the entire components. This localized approach prevents breakdown at the critical interface while maintaining the overall structural integrity and manufacturing simplicity.
2Power
If conductive material is exposed on the joint interface, then electrical conductivity is improved, but insulation characteristics deteriorate causing discharge
Solution Approach 1:
The insulating layer acts as a mediator that separates the conductive materials, allowing each to maintain its electrical properties while preventing harmful interactions. The conductive material maintains its conductivity for power transmission, while the insulating layer prevents discharge by blocking direct contact between conductive surfaces.
Solution Approach 2:
The joint interface is segmented into distinct functional zones: a conductive region for power transmission and an insulating region for discharge prevention. This segmentation allows the system to simultaneously achieve good electrical conductivity where needed while maintaining insulation characteristics to prevent breakdown.
Data Source
AI summary
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).