Consumable Ceramic Liner for Substrate Cleaning Chamber Gas Filtration

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current substrate cleaning processes face challenges in controlling the energy of radical and ionic species in energized cleaning gases, leading to substrate damage and erosion of chamber components, as well as non-uniform heating and contamination issues during the cleaning process.

Innovation Solution

A consumable ceramic liner is used to filter out ionic species from the energized gas, and a substrate heating pedestal with ceramic balls provides uniform heating while minimizing contamination, along with a process kit that includes components made of quartz to reduce radical recombination and enhance gas distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If energized cleaning gas is used to clean substrate surfaces, then cleaning effectiveness is improved, but substrate damage occurs due to high energy collisions

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidsubstrate damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A ceramic liner is introduced as an intermediary component between the gas energizer and the substrate cleaning chamber. The liner filters out high-energy ionic species from the cleaning gas while allowing radical species to pass through, thereby maintaining cleaning effectiveness while preventing substrate damage from high-energy ion bombardment

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the energy parameters of the cleaning gas by selectively removing ionic species with high kinetic energy. This parameter modification allows the cleaning process to maintain chemical reactivity from radical species while eliminating the harmful mechanical bombardment from high-energy ions

Inventive Principle:

Principle #35Parameter changes

2Reliability

If energized cleaning gas is used to clean substrate surfaces, then cleaning effectiveness is improved, but chamber components are eroded

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidcomponent lifespan

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The ceramic liner serves as a protective intermediary that absorbs the erosive impact of high-energy ionic species. By placing the liner in the path of the energized gas, the liner takes damage in place of the expensive chamber components, extending their operational lifespan

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The ceramic liner is designed as a consumable, replaceable component that can be easily replaced when eroded. This disposable element protects the permanent chamber structure, allowing frequent replacement of a low-cost component rather than shutting down for expensive component refurbishment

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Temperature

If substrate heating pedestal is used during cleaning, then temperature control is improved, but non-uniform heating and contamination occur

Engineering Contradiction:

Improvesubstrate temperature controlVSAvoidheating uniformity and cleanliness

Core Design Contradiction:

TemperatureVSManufacturing precision

Solution Approach 1:

The patent removes the substrate heating pedestal from the cleaning chamber environment. By extracting the heating function to a separate location, the substrate can be heated uniformly before cleaning without being exposed to the contaminated cleaning gas environment, eliminating both contamination risk and heating uniformity issues

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively filters out ionic species, reduces substrate damage, extends the lifespan of chamber components, and ensures uniform heating and cleaning, thereby improving the efficiency and reliability of the substrate cleaning process.

Implementation Method 1

A consumable ceramic liner is used to filter out ionic species from the energized gas

Methodology Applied

Scientific EffectAbsorption: Absorption (physical)

Implementation Method 2

a substrate heating pedestal with ceramic balls provides uniform heating

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

components made of quartz to reduce radical recombination and enhance gas distribution

Methodology Applied

Scientific EffectRadical recombination reduction:

Data Source

PatentUS8980045B2Substrate cleaning chamber and components

Publication Date: 2015.03.17 APPLIED MATERIALS INC

AI summary

A consumable ceramic liner can be used for connecting a gas outlet channel of a remote chamber to a gas inlet channel of a substrate cleaning chamber. The ceramic liner comprises an inlet cylinder having an outer diameter sized to fit in the gas outlet channel of the remote chamber, and an outlet cylinder connected to the gas inlet channel of the substrate cleaning chamber. A conical flare joins the inlet cylinder to the outlet cylinder.