Monolithic Ceramic Manifold Template Alignment
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Solution Overview
Problem
The complexity and cost of managing multiple process gases in semiconductor manufacturing are exacerbated by the need for precise control and alignment of fluid flow components in gas boxes, which often require extensive post-sintering machining to achieve high precision, leading to increased costs and logistical challenges.
Innovation Solution
A ceramic monolithic manifold design with templates that include template-locating and component-locating features, allowing for precise alignment and mounting of fluid flow components relative to the ceramic substrate, reducing the need for extensive post-sintering machining and enabling more efficient and cost-effective manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional gas box systems are used with separate control hardware for each process gas, then precise control of multiple process gases is achieved, but device complexity and manufacturing cost increase significantly
Solution Approach 1:
The patent combines multiple separate control hardware components (valves, mass flow controllers, tubing, fittings) into a single integrated ceramic monolithic manifold structure. This consolidation maintains the precise control functionality for multiple process gases while eliminating the complexity of having separate components housed in a traditional gas box.
Solution Approach 2:
The ceramic monolithic manifold serves multiple functions simultaneously: it acts as a structural support, provides fluid flow pathways for multiple process gases, incorporates mounting features for control components, and provides sealing surfaces. This multi-functionality replaces what traditionally required multiple separate components.
2Manufacturing precision
If extensive post-sintering machining is performed on ceramic substrates to achieve precise alignment, then manufacturing precision is improved, but manufacturing time and cost increase
Solution Approach 1:
The patent incorporates alignment features and mounting geometries directly into the ceramic monolithic manifold during the sintering process itself, before any post-sintering operations. The template system with locating features is designed to work with the as-sintered geometry, eliminating the need for extensive post-sintering machining to achieve precise alignment.
Solution Approach 2:
The template used in the manufacturing process creates a precise copy or replica of the drop-hole pattern and reference features on the ceramic substrate. This template serves as a master pattern that directly determines the positions of fluid flow components without requiring additional machining operations on the ceramic itself.
3Reliability
If high-precision mounting and sealing features are added to ceramic substrates, then reliability of gas delivery is improved, but the number of post-sintering operations increases
Solution Approach 1:
The patent combines multiple critical features (mounting locations, sealing surfaces, fluid flow pathways, and alignment references) into a single integrated ceramic monolithic structure. This consolidation achieves high reliability through precise feature integration while reducing the overall complexity of post-sintering operations compared to assembling multiple separate components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach streamlines the gas box design, reducing costs and improving precision in the alignment of fluid flow components, thereby enhancing the efficiency and reliability of semiconductor manufacturing processes.
Implementation Method 1
one or more template-locating features configured to interface with the one or more reference features of the ceramic substrate so as to locate the template relative to the ceramic substrate
Implementation Method 2
one or more component-locating features that are positioned at locations relative to the template reference coordinate system that are based, at least in part, on measured locations of the first drop-holes
Data Source
AI summary
Component-locating templates or masks for use with positioning fluid-flow components on monolithic ceramic substrates are provided, as well as techniques for the manufacture of such templates.