Ceramic-Metal Substrate Laser Scribing Amorphous Phase Control

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Solution Overview

Problem

The formation of amorphous phases during laser ablation in ceramic-metal substrates leads to wild breakages, contamination, and surface scratches, making the processing of these substrates challenging and inefficient.

Innovation Solution

A ceramic-metal substrate with a controlled amount of amorphous phases, limited to a width of at most 100 µm, is produced using laser ablation, where the amorphous phases extend parallel to the scribing line or cutting edge, optimizing the processing conditions to minimize stress and breakages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If laser ablation is used to create scribing lines in ceramic substrates, then cutting efficiency is improved, but amorphous phases form causing wild breakages and surface defects

Engineering Contradiction:
Improvecutting efficiencyVSAvoidsurface quality
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by optimizing laser processing parameters (power, speed, pulse duration) to control the formation of amorphous phases. By adjusting these parameters, the process achieves efficient cutting while limiting amorphous phase formation to a controlled width, preventing wild breakages and surface defects

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies partial action by allowing limited amorphous phase formation (within a controlled width) rather than completely preventing it. This controlled partial formation achieves the desired balance between cutting efficiency and surface quality, avoiding the excessive action of completely eliminating amorphous phases which would reduce productivity

Inventive Principle:
Principle #16Partial or excessive action

2Ease of manufacture

If laser ablation creates scribing lines, then substrate separation is enabled, but stress and wild breakages occur due to amorphous phase formation

Engineering Contradiction:
Improvesubstrate separationVSAvoidsubstrate integrity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent uses parameter changes to optimize laser processing conditions, controlling amorphous phase formation width through adjusted power, speed, and pulse parameters. This enables reliable substrate separation along predetermined lines while maintaining overall substrate integrity and preventing wild breakages

Inventive Principle:
Principle #35Parameter changes

3Productivity

If high processing speeds are used for laser ablation, then productivity increases, but amorphous phase formation increases causing more defects

Engineering Contradiction:
Improveprocessing speedVSAvoidamorphous phase contamination
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent applies parameter changes by optimizing the relationship between processing speed and other laser parameters (power, pulse duration). This allows high productivity through increased speed while compensating with adjusted power and pulse parameters to limit amorphous phase formation and its associated contamination

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses periodic action through pulsed laser operation. By applying laser energy in controlled pulses rather than continuous operation, the process achieves high processing speeds while allowing thermal diffusion between pulses, thereby limiting amorphous phase formation and reducing contamination

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces wild breakages and stress in the ceramic substrate by limiting the amorphous phase width, enhancing the processing efficiency and reducing contamination, allowing for easier separation and cutting of the ceramic-metal substrates.

Implementation Method 1

the ceramic substrate is melted by the laser beam and the associated introduction of thermal energy

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

the ceramic substrate is melted by the laser beam and the associated introduction of thermal energy

Methodology Applied
Scientific EffectThermal energy introduction: Heating

Implementation Method 3

Both laser ablation processes are referred to in the present application as scribing (introduction of a scribing line into the ceramic-metal substrate) or as cutting (complete cutting through of the ceramic-metal substrate)

Methodology Applied
Scientific EffectLaser heating: Laser

Data Source

PatentEP4212497A1Ceramic-metal substrate with low amorphous phase
Publication Date: 2023.07.19 HERAEUS ELECTRONICS GMBH & CO KG
  • EP4212497A1 patent drawingFigure 1~2
  • EP4212497A1 patent drawingFigure 3~4
  • EP4212497A1 patent drawingFigure 5~6

AI summary

Disclosed is a ceramic-metal substrate comprising a ceramic substrate and on at least one side of the ceramic substrate a metallization, characterized in that the ceramic-metal substrate has at least one scribing line and/or cutting edge, wherein amorphous phases extend parallel to the scribing line and/or the cutting edge in a width of at most 100 µm.