Ceramic Nozzle Member with Minute Through Holes

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Solution Overview

Problem

Conventional nozzle members with minute and long through holes (diameter of 100 μm or lower and aspect ratio of 5 or above) are difficult to manufacture due to tool deformation and high flow resistance, limiting their use in high-quality operations such as spinning and vacuum suctioning, where stable fluid flow and low turbulence are required.

Innovation Solution

A nozzle member with through holes having a diameter of 10 μm to 100 μm and a length-to-diameter ratio of 5 or above, made from ceramics with a relative density of 95% or above, using extrusion or cast molding methods with a filament guide and sintering process to achieve precise and uniform formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a through hole with a small diameter (100 μm or lower) and large aspect ratio (5 or above) is formed using conventional injection molding or extrusion molding methods, then the nozzle member can be manufactured, but the through hole-forming pin is damaged by being bent or broken

Engineering Contradiction:
Improvethrough hole diameter and aspect ratioVSAvoidthrough hole-forming pin durability
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent replaces the mechanical through hole-forming pin with a laser beam to form through holes. The laser processing method eliminates the mechanical contact and forces that cause pin bending and breaking, enabling the formation of through holes with small diameters (100 μm or lower) and large aspect ratios (5 or above) without tool damage.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the manufacturing method from mechanical molding to laser processing, fundamentally altering the process parameters. This includes using laser power, pulse duration, and scanning speed instead of mechanical pin dimensions and injection pressure, enabling precise control of through hole geometry without the physical constraints of mechanical tools.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the inner wall surface of the through hole is polished to achieve low roughness (1 S or lower), then the flow resistance of the fluid is reduced and laminar flow is achieved, but the manufacturing complexity and cost increase

Engineering Contradiction:
Improvefluid flow stability and laminar flowVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces mechanical polishing with laser processing to achieve smooth inner wall surfaces. The laser beam melts and vaporizes material precisely, creating through holes with low surface roughness (1 S or lower) directly during hole formation, eliminating the separate polishing step and reducing manufacturing complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent performs the surface finishing action during the through hole formation process itself. The laser processing simultaneously creates the through hole and produces the desired surface roughness, rather than requiring a subsequent polishing operation. This preliminary action integrates multiple functions into one step.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables stable laminar flow without turbulence, reducing manufacturing costs and energy consumption by maintaining low inner wall roughness and high Vickers hardness, allowing for efficient fluid discharge and suction with improved nozzle performance.

Implementation Method 1

forming a through hole parallel to the center axis by evaporating and removing the filament while defatting and sintering the green body

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 2

forming a through hole parallel to the center axis by evaporating and removing the filament while defatting and sintering the green body

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS8858864B2Nozzle member and process for producing the same
Publication Date: 2014.10.14 TOKYO ELECTRON LTD
  • US8858864B2 patent drawing
  • US8858864B2 patent drawing
  • US8858864B2 patent drawing

AI summary

The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 μm to 100 μm, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.