Ceramic Plasma Treatment Member Layout to Minimize Leakage Current
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Solution Overview
Problem
Existing plasma treatment apparatuses face issues with high-frequency leakage current due to the overlap of heating elements and conductive layers, which affects electrical stability and reliability.
Innovation Solution
A plasma treatment apparatus member design featuring a ceramic base with a plasma electrode, heating element, and conductive layer, where the heating element and conductive layer are positioned at different heights and do not overlap in plan view, thereby reducing the likelihood of leakage current.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the heating element and conductive layer are positioned to overlap in plan view, then electrical stability deteriorates due to leakage current, but device complexity increases due to the need for precise spatial separation
Solution Approach 1:
The patent applies dimensional separation by positioning the heating element and conductive layer at different heights (vertical dimension) within the substrate support. The heating element is located at a first height while the conductive layer is at a second height, preventing their planar overlap. This vertical separation eliminates the leakage current path while maintaining a relatively simple overall structure, thus resolving the contradiction between electrical stability and device complexity.
2Reliability
If the heating element and conductive layer are separated vertically, then leakage current is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The substrate support is segmented into distinct functional layers at different heights. The heating element and conductive layer are separated into different vertical zones within the ceramic base structure. This segmentation allows each component to be positioned and manufactured independently with standard tolerances, reducing the overall manufacturing precision requirements while ensuring adequate vertical separation to prevent electrical leakage.
3Productivity
If the plasma electrode is positioned closer to the facing surface, then plasma generation efficiency improves, but the risk of interference with heating and shielding functions increases
Solution Approach 1:
The patent positions the plasma electrode, heating element, and conductive layer at different vertical heights within the substrate support. The plasma electrode can be placed closer to the facing surface for efficient plasma generation, while the heating element and conductive layer are positioned at lower heights. This vertical dimensional separation allows the plasma electrode to operate at optimal position without electrical interference from other components, resolving the contradiction between productivity and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration stabilizes electrical characteristics and enhances reliability by minimizing leakage current, while maintaining effective electric field blocking and efficient heating of substrates.
Implementation Method 1
The plasma treatment apparatus generates plasma of a process gas in a treatment space between the substrate support and the shower head
Implementation Method 2
The heating element and the conductive layer are located farther from the facing surface than the plasma electrode is, inside the base
Data Source
AI summary
A plasma treatment apparatus member according to the present disclosure includes a base, a plasma electrode, a heating element, and a conductive layer. The base is made of a ceramic and has a facing surface facing an object to be processed. The plasma electrode is located inside the base. The heating element and the conductive layer are located farther from the facing surface than the plasma electrode are, inside the base. The heating element and the conductive layer do not overlap each other in plan view seen from a direction orthogonal to the facing surface, and are located at different heights in side view seen from a direction parallel to the facing surface.