Non-destructive Ceramic Ring Dielectric Measurement Fixture
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Solution Overview
Problem
Current methods for measuring the dielectric constant of ceramic rings in plasma processing chambers are destructive and provide localized, non-representative values, leading to inaccurate power dissipation calculations due to high dielectric constants and phase delays.
Innovation Solution
A non-destructive test fixture with an inner and outer conductor, designed to match the characteristic impedance of an RF connector, allowing for the measurement of the entire ceramic ring, enabling averaging of dielectric constants and other electrical properties, thereby providing macro measurements applicable to the actual processing environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If destructive testing methods are used to measure dielectric constant, then localized measurements can be obtained, but the measurements are not representative of the entire ceramic structure and require material removal
Solution Approach 1:
The ceramic ring is segmented into multiple measurement zones along its length, with each zone contributing to the overall dielectric constant measurement. The test fixture enables independent measurement of different segments, and the results are averaged to obtain a representative macro value for the entire ceramic structure.
Solution Approach 2:
The test fixture is designed to universally measure the dielectric constant of entire ceramic rings of various dimensions without requiring destructive sample preparation. The fixture accommodates different ceramic ring sizes and performs non-destructive electrical measurements, making it applicable to production quality control for various ceramic components.
2Measurement precision
If small localized samples are tested, then dielectric constant can be measured, but the tested portion does not represent the ceramic structure as a whole
Solution Approach 1:
The measurement process merges the electrical response of the entire ceramic ring into a single dielectric constant value. The test fixture applies electrical signals across the complete ceramic ring, and the measured impedance incorporates contributions from all portions of the ceramic, providing an averaged macro measurement that represents the whole structure.
3Productivity
If high dielectric constant and phase delay are present in the ceramic ring, then plasma processing can be performed, but unwanted power dissipation occurs
Solution Approach 1:
The test fixture provides feedback on the dielectric constant and phase delay of the ceramic ring before the ceramic is installed in the plasma processing chamber. This information allows selection of ceramics with optimal electrical properties that balance plasma processing performance with acceptable power dissipation levels, preventing excessive energy loss in the ceramic ring.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, non-destructive measurement of dielectric constants and other electrical properties over the entire ceramic ring, reducing errors in power dissipation calculations and ensuring uniform quality of ceramic structures.
Implementation Method 1
measuring the dielectric constant of a test sample, such as a ceramic ring
Implementation Method 2
The dimensions of the sidewalls of the inner and outer conductors are designed to match a characteristic impedance of an RF connector
Data Source
AI summary
A test fixture includes an outer conductor and an inner conductor disposed within and electrically isolated from the outer conductor. The inner conductor includes a top portion having a first diameter, a bottom portion having a second diameter, and a third portion proximate the bottom portion that has a third diameter that is less than the second diameter and is greater than the first diameter. An electrical property of a chamber component disposed within the outer conductor is measurable based on application of a signal to at least one of the outer conductor or the inner conductor.