Ceramic Sample Holder with Glass-Containing Resistor for Thermal Stress Reduction
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Solution Overview
Problem
The existing sample holders for semiconductor wafers face reliability issues due to thermal stress between the ceramic substrate and the heat-generating element circuit, leading to potential separation and reduced long-term durability.
Innovation Solution
A sample holder with a ceramic substrate and a heat-generating resistor containing a glass component, where the glass component diffuses into the substrate, enhancing adhesion and providing an electric field shielding effect, thereby reducing thermal stress and improving heat distribution and uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a heat-generating element circuit is formed on a ceramic substrate, then heating function is achieved, but thermal stress causes separation between the circuit and substrate
Solution Approach 1:
The patent applies composite materials by forming a glass-containing layer that integrates the heat-generating resistor and ceramic substrate. The glass component (containing PbO, SiO2, B2O3, Al2O3, and ZnO in specific ratios) creates a composite structure that combines the electrical functionality of the resistor with the thermal stability of the ceramic, while the glass matrix accommodates thermal expansion differences and prevents separation under thermal stress.
Solution Approach 2:
The patent changes the chemical composition parameters of the glass-containing layer by specifying precise weight ratios of multiple oxides (PbO: 40-60%, SiO2: 10-30%, B2O3: 5-15%, Al2O3: 5-15%, ZnO: 5-15%). This compositional optimization adjusts the thermal expansion coefficient and adhesion properties of the layer, enabling it to match the ceramic substrate and resist thermal stress during heating cycles.
2Reliability
If thermal stress is reduced through material composition, then adhesion is improved, but manufacturing complexity increases
Solution Approach 1:
The patent merges multiple functions into a single glass-containing layer: it serves as the substrate for the heat-generating resistor, provides thermal stress relief through compositional matching, ensures adhesion between the resistor and ceramic substrate, and facilitates sintering at controlled temperatures. This consolidation eliminates the need for separate adhesive layers or intermediate structures, simplifying the overall manufacturing process despite the complex material composition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly enhances the durability of the sample holder by improving adhesion between the substrate and the heat-generating resistor, reducing thermal stress, and stabilizing temperature control, leading to increased reliability and uniformity in heat transfer and etching processes.
Implementation Method 1
the glass component diffuses into the substrate, enhancing adhesion
Implementation Method 2
providing an electric field shielding effect, thereby reducing thermal stress
Implementation Method 3
a heat-generating resistor provided on an other main surface of the substrate
Data Source
AI summary
A sample holder includes a substrate composed of ceramics, having a sample holding surface on one main surface thereof; and a heat-generating resistor provided on an other main surface of the substrate, containing a glass component. The substrate contains the glass component in a vicinity region of the heat-generating resistor.