Ceramic Shower Plate Support with Convex Grain Interface
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Solution Overview
Problem
The existing methods for fixing a ceramic shower plate to a metal support member in semiconductor manufacturing are complex and costly, and the difference in linear expansion coefficients leads to thermal stress damage.
Innovation Solution
A ceramic structure comprising a sapphire or yttrium aluminum composite oxide first member and an aluminum oxide second member with convex contact grains, supported by an annular member with through holes, ensuring a secure and stress-reduced attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the outer peripheral side of the shower plate is directly fixed to a metal support member, then the manufacturing process becomes complicated and cost increases, but the mechanical strength and reliability are improved
Solution Approach 1:
The patent merges the support function and sealing function into a single ceramic annular member. This member simultaneously supports the shower plate and provides sealing through its contact with the shower plate's outer peripheral side, eliminating the need for separate support structures and complex assembly processes while maintaining mechanical strength
Solution Approach 2:
The patent uses a ceramic annular member made of the same material as the shower plate (both being ceramic). This material homogeneity simplifies the manufacturing process by using identical materials for both components, reduces thermal stress due to matched thermal expansion coefficients, and maintains reliable mechanical support
2Strength
If the shower plate is fixed to a metal support member, then mechanical strength is improved, but thermal stress damage occurs due to difference in linear expansion coefficients
Solution Approach 1:
The patent employs a ceramic annular member made of the same ceramic material as the shower plate. This ensures identical linear expansion coefficients for both components, eliminating thermal stress caused by differential expansion during heating and cooling cycles, thereby maintaining reliability under thermal conditions while providing mechanical support
3Ease of manufacture
If a simple support structure is used, then manufacturing cost is reduced, but air tightness and particle generation control are compromised
Solution Approach 1:
The patent combines the support function and sealing function into a single integrated ceramic annular member. The member's contact with the shower plate's outer peripheral side simultaneously provides mechanical support and creates an air-tight seal, preventing particle generation from gaps while maintaining manufacturing simplicity and cost-effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the anchor effect, reduces the risk of particle and gas generation, improves air tightness, and minimizes thermal stress, thereby simplifying the manufacturing process and reducing costs while maintaining mechanical strength and reliability.
Implementation Method 1
contact grains of the second member in contact with the first member include a first curved surface part that is convex toward the first member
Implementation Method 2
the difference in the linear expansion coefficients of the shower plate and the support member
Data Source
AI summary
A ceramic structure of the present disclosure is provided with: a first member made of a single crystal of sapphire or an yttrium aluminum composite oxide; and a second member in contact with the first member, the second member being made of ceramic containing an aluminum oxide or an yttrium aluminum composite oxide as a principal component, wherein, of crystal grains constituting the second member, contact grains of the second member, which are grains in contact with the first member, include a first curved surface part that is convex toward the first member.