Sintered Ceramic Substrate Surface Treatment for Electrochemical Robustness

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

High power electronic modules face reliability issues due to electrochemical migration caused by sintering aids and impurities on ceramic substrates, leading to potential short circuits under harsh conditions.

Innovation Solution

A sintered ceramic substrate with a higher weight percentage of ceramic bulk material on its surface compared to its body, using Al2O3, ZTA, or Si3N4 with FeO, Fe2O3, or Fe3O4 as sintering aids, where these aids and impurities are removed through chemical and mechanical means to prevent surface concentration, thereby reducing the risk of electrochemical migration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If sintering aids are added to ceramic bulk material during sintering, then sintering performance and grain growth control are enhanced, but sintering aids accumulate on the surface and cause electrochemical migration leading to short circuits

Engineering Contradiction:
Improvesintering performanceVSAvoidelectrochemical robustness
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent extracts and removes sintering aids and impurities from the ceramic surface through chemical etching processes. The etching solution selectively removes the glassy additive phase and accumulated sintering aids from the surface while preserving the ceramic bulk material, thereby eliminating the source of electrochemical migration without affecting the sintering performance already achieved.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies local quality by creating a surface treatment that differs from the bulk material. The chemical etching process modifies only the surface region, removing sintering aids from the surface while leaving the interior structure intact. This results in a surface with different composition and properties than the bulk, specifically reducing electrochemical activity at the surface where it is most problematic.

Inventive Principle:
Principle #3Local quality

2Reliability

If chemical etching is applied to remove sintering aids from surface, then electrochemical robustness is improved, but ceramic bulk material may also be removed

Engineering Contradiction:
Improveelectrochemical robustnessVSAvoidceramic bulk material
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The patent uses an intermediary approach by employing a chemical etching solution that selectively targets the glassy additive phase and sintering aids rather than the ceramic bulk material. The etching chemistry is chosen to preferentially react with and remove the unwanted surface components while being less aggressive toward the stable ceramic matrix, thus acting as a selective mediator in the removal process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent controls the etching process by adjusting parameters such as etching solution composition, temperature, and exposure time to achieve selective removal. By optimizing these parameters, the process removes sintering aids effectively while minimizing ceramic bulk material loss. The parameter control ensures that the etching stops at the desired depth, preserving the structural integrity of the ceramic substrate.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The approach enhances the electrochemical robustness of ceramic substrates, reducing the likelihood of short circuits and improving the reliability of power modules by minimizing the presence of sintering aids and impurities on the surface, thus ensuring stable operation under high temperature and moisture conditions.

Implementation Method 1

the fabrication of ceramic substrates from ceramic bulk materials usually includes a heat treatment step in which a powder is converted into a dense solid. This step is called 'sintering'

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 2

Ceramic substrates, and in particular alumina substrates, are most commonly produced using liquid phase sintering. Liquid phase sintering involves the addition of an additive to the ceramic powder which will melt before the matrix phase.

Methodology Applied
Scientific EffectLiquid phase sintering:

Implementation Method 3

the ceramic surface is finely roughened by means of a chemical after-treatment

Methodology Applied
Scientific EffectChemical etching:

Data Source

PatentEP3375767B1Electrochemically robust ceramic substrates
Publication Date: 2020.05.13 INFINEON TECHNOLOGIES AG

AI summary

A sintered ceramic substrate obtained from a ceramic bulk material, a sintering aid and/or impurities characterized in that the weight amount of ceramic bulk material in at least one surface of the sintered ceramic substrate is higher than in the body of the ceramic substrate is disclosed.