Ceramic Susceptor Groove Layout for Non-Intersecting Internal Paths
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Solution Overview
Problem
Existing ceramic susceptors face challenges in integrating multiple internal paths such as purge gas flow paths, vacuum suction paths, and thermocouple insertion paths in a single-layer configuration without intersecting, which is necessary to maintain their respective functions while avoiding increased manufacturing costs.
Innovation Solution
The ceramic susceptor is designed with straight-line portions for each internal path, and specific angles between these paths are optimized to ensure non-intersection, allowing all paths to be contained within a single layer on a two-layer ceramic plate configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple internal paths (purge gas flow path, vacuum suction path, thermocouple insertion path) are arranged separately in first and second bonding surfaces to avoid intersection, then the functions of internal paths are secured, but manufacturing cost increases
Solution Approach 1:
The patent transitions from a two-layer configuration (separating paths across first and second bonding surfaces) to a single-layer configuration (arranging all paths within one bonding surface). This dimensional consolidation eliminates the need for multi-layer bonding while maintaining path functionality through optimized planar arrangement with specific angular relationships between straight-line portions of different paths.
2Ease of manufacture
If multiple types of internal paths are provided in a single-layer configuration along one bonding surface, then manufacturing cost is reduced, but it becomes difficult to satisfy the peculiar positional constraints and requirements of each path
Solution Approach 1:
The patent applies local quality by giving each internal path specific geometric characteristics - straight-line portions with defined angles relative to each other. Each path type (purge gas, vacuum suction, thermocouple insertion) has its own optimal orientation and positioning within the single bonding surface, allowing functional requirements to be met while maintaining single-layer simplicity.
Solution Approach 2:
The patent uses parameter changes by specifying angular relationships between the straight-line portions of different internal paths. By controlling the angles at which paths diverge from common regions, the design satisfies positional constraints for each path type while maintaining a compact single-layer configuration that reduces manufacturing complexity.
3Ease of manufacture
If internal paths are arranged to avoid intersection in a single layer, then manufacturing cost is reduced, but achieving stable suction force and uniform temperature becomes more challenging
Solution Approach 1:
The patent employs asymmetric angular arrangements of the straight-line portions of internal paths within the single bonding surface. This asymmetric configuration optimizes the distribution and flow characteristics of purge gas and vacuum suction while accommodating the thermocouple insertion path, thereby maintaining uniform temperature and stable suction force despite the simplified single-layer structure.
Data Source
AI summary
There is provided a ceramic susceptor including a disk-shaped ceramic plate bonded body including an upper ceramic plate and a lower ceramic plate, an internal electrode embedded in the bonded body, and a purge gas groove, a vacuum suction groove, and a thermocouple insertion groove that are respectively provided on a bonding surface side of the upper ceramic plate or the lower ceramic plate. The ceramic plate bonded body has a central zone and an outer peripheral zone. The purge gas groove, the vacuum suction groove, and the thermocouple insertion groove respectively have straight-line portions in the central zone. An angle θ1 formed by a straight-line portion of the purge gas groove and a straight-line portion of the thermocouple insertion groove, and an angle θ2 formed by the straight-line portion of the purge gas groove and a straight-line portion of the vacuum suction groove satisfy 90°<θ1<180°, 135°<θ2<225°, and θ1<θ2.