Ceramic Susceptor Heater Layout for Uniform Temperature and Longer Life
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Solution Overview
Problem
Conventional ceramic susceptors suffer from temperature non-uniformity and reduced lifespan due to hairpin sections with high heat generation density, leading to thermal stress and crack formation during semiconductor processes.
Innovation Solution
A ceramic susceptor design with a heating element pattern that eliminates hairpin sections, featuring curved resistance sections with larger radii and intersecting extension lines, improving temperature uniformity and extending the heater's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a hairpin section with sharp curve is used in the heating element pattern, then the heating element can be folded in a narrow region to achieve compact design, but high heat generation density in that region causes thermal stress and cracks, reducing the lifespan of the heater pattern
Solution Approach 1:
The patent applies curvature principle by replacing the sharp hairpin curve with a gentle arc-shaped curve in the heating element pattern. The curved section has a radius of curvature R that satisfies 5mm ≤ R ≤ 50mm, ensuring the curve is smooth enough to avoid stress concentration while maintaining compact folding capability. This resolves the contradiction by making the curve radius large enough to prevent cracks but small enough to achieve compact design.
2Productivity
If the heating element pattern includes a hairpin section with high pattern density, then the central portion can be efficiently utilized, but the high heat generation density in that region leads to thermal stress and crack formation during long-term use
Solution Approach 1:
The patent applies local quality principle by differentiating the curve radius requirements for different sections of the heating element pattern. The central curved section has a larger radius of curvature (5mm ≤ R ≤ 50mm) to reduce heat generation density and thermal stress, while other sections can have smaller curves to maintain heating efficiency. This allows the pattern to have both high productivity and reduced harmful thermal effects.
3Quantity of substance
If a sharp curved hairpin section is used in the central portion, then the heating element can be embedded with high density in the central region, but temperature uniformity across the susceptor surface deteriorates
Solution Approach 1:
The patent applies curvature principle to distribute heat generation more uniformly across the susceptor surface. By using a gentle arc-shaped curve with radius R (5mm ≤ R ≤ 50mm) in the central portion instead of a sharp hairpin curve, the heating element pattern spreads out the heat generation density, preventing localized overheating and improving overall temperature uniformity while maintaining high embedding density.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances temperature uniformity across the susceptor's surface and significantly extends the heater pattern's lifespan by avoiding sharp curves and thermal stress.
Implementation Method 1
when the heating element is fed with power and generates heat to heat a semiconductor wafer substrate or the like
Implementation Method 2
This is caused by thermal stress caused by differences in thermal expansion rates of the heating element embedded in the ceramic material
Data Source
AI summary
Disclosed is a ceramic susceptor. The susceptor of the present disclosure may include an insulating plate in which a heating element is disposed, and a shaft joined to a bottom portion of the insulating plate. The heating element may include a first heating element pattern including a first resistance section and a first connecting section connected between a first pair of terminals. When the first resistance section is projected onto a plane of the insulating plate, the first resistance section may include a first central resistance section disposed within a smaller diameter region than a joint portion between the insulating plate and the shaft.