Ceramic Susceptor RF Connection Mount for Thermal Expansion Mismatch
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Solution Overview
Problem
Conventional ceramic susceptors experience cracks and short circuits due to differences in thermal expansion between RF electrode rods, leading to instability in RF power supply and potential abnormalities in semiconductor processes.
Innovation Solution
A ceramic susceptor design featuring a connection mount with an elastic member that absorbs thermal expansion differences between RF electrode rods, preventing cracks and short circuits by using a connection member with a bent plate and coupling members to distribute heat evenly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If two RF electrode rods are installed in the shaft to reduce load, then the load capacity is improved, but cracks or short circuits occur due to different thermal expansion degrees
Solution Approach 1:
A connection member is introduced as an intermediary component between the RF electrode rods and the shaft. This connection member includes a flexible portion that can elastically deform to accommodate thermal expansion differences, and a damping portion that absorbs thermal stress. The intermediary structure prevents direct stress transmission that would cause cracks or short circuits while maintaining electrical connectivity.
Solution Approach 2:
The connection member is designed with specific material properties and structural parameters that enable it to change its physical state in response to thermal variations. The flexible portion can elastically deform, and the damping portion can absorb thermal energy, allowing the system to adapt to thermal expansion differences without compromising the RF electrode rods or electrical connections.
2Productivity
If RF power is increased for refinement of semiconductor processes, then productivity is improved, but thermal expansion differences cause cracks and short circuits
Solution Approach 1:
The connection member serves as a mediator that isolates the RF electrode rods from thermal stress caused by high RF power operation. The flexible and damping portions of the connection member absorb and distribute thermal energy, preventing concentration of stress that would lead to cracks or short circuits during high-power semiconductor processing.
Solution Approach 2:
The connection member is pre-designed with flexible and damping portions that provide cushioning against thermal expansion before damage can occur. This preventive structure absorbs thermal stress in advance, protecting the RF electrode rods and electrical connections from cracks and short circuits that would otherwise result from high RF power operation.
3Force
If two separated RF electrode rods are used to reduce load, then load is reduced, but degrees of thermal expansion differ causing failure
Solution Approach 1:
The connection member acts as an intermediary that equalizes thermal expansion effects between the two RF electrode rods. The flexible portion allows independent movement of each rod while the damping portion absorbs differential thermal stress, maintaining uniform thermal expansion behavior across both rods without compromising load reduction benefits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Maintains constant electrical characteristics and prevents arcing or local heat generation, enhancing semiconductor process stability and yield by absorbing thermal expansion deformations and reducing oxidation risks.
Implementation Method 1
even if there is a difference in thermal expansion between the RF electrode rods, electrical characteristics can be maintained without generating cracks and short-circuit in RF electrode rods by applying a connection member capable of absorbing the difference in thermal expansion
Implementation Method 2
the connection member includes an elastic member configured to absorb a difference in deformation due to heat among the first rod, the second rod, and the draw-in rod
Data Source
AI summary
The present disclosure relates to a ceramic susceptor. The ceramic susceptor of the present disclosure may include: an insulating plate in which a RF electrode is disposed; a shaft connected to the insulating plate at one end and comprising a separator at a remaining end; a connection mount having an upper portion connected to the remaining end of the shaft; a first rod and a second rod connected to the RF electrode and penetrating the separator to extend into the connection mount; and a connection member disposed in the connection mount and connecting the first rod and the second rod extending into the connection mount to a draw-in rod, wherein the connection member may include an elastic member configured to absorb a difference in deformation due to heat among the first rod, the second rod, and the draw-in rod.