Ceramic Susceptor Shaft Layout for Stable Electrode Rod Insulation
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Solution Overview
Problem
Conventional ceramic susceptors face issues with electrode rods moving or shaking within the hollow shaft, leading to physical bending and short-circuiting, and require separate insulator coatings due to spatial constraints, limiting flexibility in rod arrangement and increasing the risk of arcing.
Innovation Solution
The electrode rods are arranged in side wall holes of the hollow shaft, eliminating movement and bending spaces, allowing for flexible design and eliminating the need for separate insulator coatings, while maintaining adequate spacing to prevent arcing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If electrode rods are arranged within the through-hole of the hollow shaft, then the structure is compact, but the rods are prone to move or shake and may bend or short-circuit
Solution Approach 1:
The through-hole of the hollow shaft is divided into multiple side wall holes, with each electrode rod arranged in a separate side wall hole. This segmentation prevents the rods from moving or shaking within a large open space, eliminating the risk of physical bending and short-circuiting while maintaining compact structure.
Solution Approach 2:
Each side wall hole provides a dedicated localized space for individual electrode rods, giving each rod its own confined environment. This local quality ensures that each rod is securely positioned without interfering with others, improving reliability while maintaining compact overall design.
2Reliability
If separate insulator coatings are applied to electrode rods, then arcing is prevented, but the spacing between rods becomes narrower and design flexibility is limited
Solution Approach 1:
The hollow shaft itself serves as the insulator for the electrode rods, merging the structural support function with the insulation function. This eliminates the need for separate insulator coatings, maintaining adequate spacing between rods and preserving design flexibility for different electrode configurations.
Solution Approach 2:
The hollow shaft performs multiple functions: it provides structural support, acts as an insulator between electrode rods, and defines the positioning of electrodes through side wall holes. This multi-functionality eliminates the need for additional insulator components, maintaining spacing and design flexibility.
3Area of stationary object
If multiple electrode rods are densely packed in the center of the through-hole, then space is utilized efficiently, but changing the number or positions of rods is limited
Solution Approach 1:
The hollow shaft is segmented into multiple side wall holes distributed along its circumference, allowing electrode rods to be arranged in different positions and numbers. This segmentation enables flexible configuration changes by simply adding or removing rods from specific side wall holes without affecting the overall structure.
Solution Approach 2:
The electrode rod configuration becomes dynamic and adaptable, allowing the number and positions of rods to be changed based on different process requirements. Side wall holes can be selectively used to accommodate varying numbers of rods, providing design flexibility while maintaining space efficiency.
Data Source
AI summary
Disclosed is a ceramic susceptor. The ceramic susceptor may include: an insulating plate in which one or more electrodes are arranged; a hollow shaft with one end connected to the insulating plate; and one or more electrode rods connected to the electrodes. The hollow shaft may include one or more side wall holes penetrating an interior of a side wall, and the one or more electrode rods may include one or more first electrode rods, each of which is electrically connected to a first electrode among the one or more electrodes. The first electrode rods may extend through the side wall holes, respectively.