Ceramic Susceptor Shaft Layout for Air Pumping and Heat Loss
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional ceramic susceptors face challenges in aligning and joining parts due to difficulties in forming a through-passage in the side wall of the shaft, leading to reduced yield and increased processing costs. Additionally, the need for a large cross-sectional area in the shaft results in heat loss and temperature non-uniformity.
Innovation Solution
The ceramic susceptor design enables air pumping through the inner space of the shaft, facilitating alignment and joining of parts. This design eliminates the need for machining a through-hole in the side wall of the shaft, allowing for a smaller cross-sectional area and reducing heat loss. The power supply rod is made of a single material without an anti-oxidation intermediate layer, reducing electrical resistance and shear stress-related issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a through-passage is formed in the side wall of the shaft to enable air pumping, then air pumping function is achieved, but alignment and joining of parts becomes difficult
Solution Approach 1:
The air pumping passage is relocated from the side wall (horizontal dimension) to the inner space of the shaft (vertical/central dimension). This dimensional shift allows the passage to be formed more easily during the insulating film formation process without compromising the alignment and joining of shaft parts, while still achieving the air pumping function through the central channel.
Solution Approach 2:
The air pumping function is extracted from the shaft wall structure and implemented through a separate central passage formed in the insulating film. This separation allows the shaft to maintain its structural integrity and ease of manufacturing, while the air pumping capability is achieved through the independently formed central channel.
2Adaptability or versatility
If the shaft has a large cross-sectional area to accommodate the side wall passage, then air pumping is enabled, but heat loss increases
Solution Approach 1:
The passage is moved from the side wall to the central inner space of the shaft. This allows the shaft to maintain a smaller cross-sectional area since the passage no longer requires lateral space, thereby reducing heat loss while preserving air pumping capability through the central channel.
Solution Approach 2:
The air pumping passage is formed during the insulating film formation process before final assembly. This preliminary action integrates the passage formation with existing manufacturing steps, eliminating the need for additional machining that would require larger shaft dimensions and cause heat loss.
3Ease of manufacture
If the heating element is arranged in a curved manner to avoid the side wall passage, then passage alignment is simplified, but temperature uniformity deteriorates
Solution Approach 1:
The passage is relocated to the central inner space of the shaft rather than being formed in the side wall. This eliminates the need for curved heating element arrangements, allowing the heating element to be positioned in a standard configuration that ensures uniform temperature distribution across the substrate.
4Reliability
If the power supply rod uses an anti-oxidation intermediate layer, then oxidation resistance is improved, but electrical resistance increases
Solution Approach 1:
The inner space of the shaft is maintained in a vacuum state, creating an inert environment that prevents oxidation of the power supply rod. This eliminates the need for anti-oxidation intermediate layers, allowing the use of pure copper or other highly conductive materials that minimize electrical resistance while maintaining oxidation resistance through the vacuum environment.
Data Source
AI summary
The present disclosure relates to a ceramic susceptor, and the ceramic susceptor according to the present disclosure includes: an insulation plate on which an electrode is disposed; a shaft connected to the insulation plate; and a power supply rod connected to the electrode and extending through an inner space of the shaft, wherein the insulation plate includes a first through-passage formed through the upper surface and the lower surface thereof and configured to communicate the inner space of the shaft therewith.