Ceramic Susceptor Electrode Rod Structure for Skin-Effect Impedance
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Solution Overview
Problem
Existing semiconductor susceptor electrode rods experience increased impedance and oxidation due to the skin effect, leading to reduced power transmission efficiency, frequent short circuits, and decreased lifespan, especially under high-frequency and high-temperature conditions.
Innovation Solution
A ceramic susceptor with an electrode rod structure featuring a base material of Mo, W, or their alloys, coated with a metal nitride film such as AlCrN, designed to maintain low impedance and resist heat generation, while ensuring good brazing characteristics and oxidation resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If Ni-based heat-resistant material is used for the electrode rod, then oxidation resistance is improved, but impedance increases due to the skin effect in high-frequency range
Solution Approach 1:
The electrode rod is constructed as a composite structure with a Ni-based alloy core material providing oxidation resistance and an Ag-based alloy outer layer providing low impedance. This composite material approach allows both oxidation resistance and low impedance characteristics to coexist in the same component.
Solution Approach 2:
Different materials are applied to different parts of the electrode rod: the inner core uses Ni-based alloy for oxidation resistance while the outer surface uses Ag-based alloy for low impedance. This local quality differentiation optimizes each material's properties where they are most needed.
2Productivity
If high-frequency power transmission is used to achieve enhanced plasma characteristics, then productivity is improved, but heat generation increases due to the skin effect
Solution Approach 1:
The Ag-based alloy outer layer of the composite electrode rod provides low impedance and reduced skin effect, enabling high-frequency power transmission with minimal heat generation. This allows enhanced plasma characteristics to be achieved while maintaining energy efficiency.
3Reliability
If the gap between support and electrode rod is reduced to prevent oxidation, then reliability is improved, but manufacturing precision requirements increase
Solution Approach 1:
The oxidation-resistant Ni-based alloy core material eliminates the need for tight gap control, as the material itself resists oxidation. This allows for more relaxed manufacturing tolerances while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The susceptor achieves improved durability and high-frequency transmission characteristics by reducing heat generation and oxidation, enhancing plasma efficiency and extending the lifespan of the susceptor.
Implementation Method 1
the impedance of the electrode rod increases due to the skin effect in which the current flows along the surface of the electrode rod, and heat generation occurs
Implementation Method 2
the gap between the support 34 and the lower electrode rod 32 or the gap between the support 34 and the ceramic plate 30 may act as a path through which oxygen may penetrate in a high-temperature atmosphere, thereby oxidizing the upper electrode rod 31 and the lower electrode rod 32
Data Source
AI summary
The present disclosure relates to a ceramic susceptor including a ceramic plate having an electrode disposed thereon, wherein the ceramic plate may include an electrode pad connected to the electrode and an electrode rod having one end connected to the electrode pad to supply power to the electrode, and the electrode rod may include an extension part connected to the electrode pad and a power connection part provided at an end of a tapered portion of the extension part.