Ceramic Susceptor Terminal Isolation for Underwater Insulation
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Solution Overview
Problem
The existing ceramic susceptor designs experience a decrease in underwater insulation resistance due to the exposure of the ceramic bonding interface, leading to potential abnormalities in semiconductor production processes.
Innovation Solution
A ceramic susceptor with a terminal rod and eyelet in its terminal hole, featuring a structure that electrically isolates the terminal rod and eyelet from the ceramic bonding interface, thereby maintaining high underwater insulation resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the ceramic susceptor includes a terminal rod and eyelet in the terminal hole, then electrical connection is established, but the underwater insulation resistance decreases due to exposure of the ceramic bonding interface
Solution Approach 1:
The patent introduces a resin layer as an intermediary substance between the terminal rod/eyelet and the ceramic bonding interface. This resin layer fills the terminal hole and surrounds the terminal components, creating an insulating barrier that prevents direct exposure of the ceramic bonding interface to water while maintaining electrical connection functionality.
Solution Approach 2:
The patent uses a resin material that is easier to apply and remove compared to traditional ceramic bonding interfaces. The resin layer serves as a sacrificial or replaceable insulating component that can be easily manufactured and adjusted, providing cost-effective insulation protection.
2Ease of operation
If the terminal hole is provided to penetrate the ceramic bonding interface, then electrical connection is enabled, but the ceramic bonding interface becomes exposed and insulation resistance decreases
Solution Approach 1:
The resin layer acts as a mediator that fills the terminal hole and provides insulation. It allows the terminal rod to pass through while preventing water from contacting the ceramic bonding interface, thus enabling electrical connection without compromising insulation resistance.
Solution Approach 2:
The patent applies different properties to different regions: the terminal hole area receives resin filling for insulation, while the rest of the ceramic bonding interface maintains its original structure. This localized treatment ensures electrical connection functionality while protecting only the critical exposed areas.
Data Source
AI summary
There is provided a ceramic susceptor including a ceramic plate bonded body including a first ceramic plate and a second ceramic plate; an internal electrode embedded in the first ceramic plate; a terminal hole provided to penetrate the second ceramic plate in a thickness direction so as to reach the internal electrode and the like, the terminal hole including a small-diameter portion and a large-diameter portion, the small-diameter portion closer to a bottom of the terminal hole, the large-diameter portion far from the bottom of the terminal hole; an eyelet made of metal and adapted to be fitted in the small-diameter portion; a terminal rod inserted through the terminal hole and the eyelet, the terminal rod having one end connected to the internal electrode; and an isolation structure including a space and/or an insulating material for electrically isolating the terminal rod and the eyelet from the ceramic bonding interface.