Ceramic Structural Member With Underlayer for Plasma-Resistant Films
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Solution Overview
Problem
The orientation of crystallites on a ceramic base material surface significantly affects the durability of a protective film, with specific orientations leading to reduced durability against plasma.
Innovation Solution
A structural member is designed with a ceramic base material, an underlayer with irregularly oriented crystallites, and a protective film that covers the underlayer rather than the base material, ensuring the protective film does not directly cover crystallites oriented in a specific direction that lowers durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a protective film is formed directly on the base material surface, then the structure is simple and manufacturing is easier, but the durability against plasma is significantly lowered when crystallites are oriented in specific directions
Solution Approach 1:
An underlayer is introduced as an intermediary between the base material and the protective film. This underlayer has irregular crystallite orientations that prevent the formation of large-area regions with uniform specific orientations, thereby maintaining protective film durability while allowing the protective film to be formed using standard deposition methods.
Solution Approach 2:
The structure is divided into three distinct layers: base material, underlayer, and protective film. The underlayer is segmented into multiple small crystallites with irregular orientations, which breaks up the continuous specific orientation that would otherwise extend across the entire protective film area, thus preventing widespread durability issues.
2Reliability
If all crystallites on the base material surface are adjusted to have orientations different from the specific direction, then the protective film durability is improved, but the device complexity and manufacturing difficulty increase significantly
Solution Approach 1:
The underlayer serves as a mediator that naturally provides irregular crystallite orientations through standard deposition processes, eliminating the need for complex adjustments to base material crystallite orientations. This maintains durability improvement while keeping the manufacturing process relatively simple.
Solution Approach 2:
Instead of attempting to control the complex parameter of crystallite orientation across the entire base material surface, the invention changes the approach by controlling the parameters of the underlayer (thickness, deposition conditions) to naturally produce irregular crystallite orientations, thereby simplifying the manufacturing process.
3Device complexity
If the protective film covers the base material surface directly, then the structure is simpler, but the durability is compromised when crystallites are oriented in specific directions
Solution Approach 1:
The underlayer is positioned as an intermediary layer between the base material and protective film. It has irregular crystallite orientations that prevent the formation of large-area regions with uniform specific orientations, thereby maintaining protective film durability while allowing the protective film to be formed using standard deposition methods.
Solution Approach 2:
The structure is divided into three distinct layers: base material, underlayer, and protective film. The underlayer is segmented into multiple small crystallites with irregular orientations, which breaks up the continuous specific orientation that would otherwise extend across the entire protective film area, thus preventing widespread durability issues.
Data Source
AI summary
A structural member 10 includes a base material 100 which is a ceramic, an underlayer 200 covering a surface S1 of the base material 100, and a protective film 300 covering a surface S2 of the underlayer 200. An orientation of each crystallite 210 on a surface S2 of the underlayer 200 on the protective film 300 side is not aligned and is irregular.