Double Cross-Coupled CFET Flip-Flop Layout for Routing Congestion

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Solution Overview

Problem

The semiconductor industry faces challenges in scaling transistors to single-digit nanometer nodes, particularly in transitioning from two-dimensional (2D) to three-dimensional (3D) circuit designs, where transistors are stacked vertically to increase density and performance, while maintaining efficient connectivity and minimizing wiring congestion.

Innovation Solution

The implementation of a semiconductor device with a cell array featuring cross-coupled complementary field-effect transistors (CFETs) in a double row-height layout, where poly tracks function as inter-row gates and split gates, allowing for efficient integration and connectivity between transistors, reducing the need for additional metallization and alleviating routing congestion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If transistors are stacked vertically to increase density (3D circuit design), then transistor density and performance are improved, but wiring congestion and connectivity complexity increase

Engineering Contradiction:
Improvetransistor densityVSAvoidwiring congestion
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from traditional 2D planar circuit layout to 3D vertical stacking architecture. Multiple transistor layers are stacked vertically above each other on the substrate, with interconnect structures extending through multiple layers. This dimensional change allows significantly higher transistor density while managing wiring complexity through vertical interconnect access points that reduce the need for extensive lateral routing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested interconnect structures where conductive pathways are embedded within and between transistor layers. Interconnect structures are positioned at multiple vertical levels, with lower-level interconnects nested within regions occupied by upper-level transistors and vice versa. This nesting approach allows efficient three-dimensional routing that minimizes wiring congestion by utilizing vertical space for signal distribution.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of operation

If more metal tracks are added to maintain connectivity in 3D layout, then connectivity is improved, but device area and manufacturing complexity increase

Engineering Contradiction:
ImproveconnectivityVSAvoiddevice area
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent utilizes vertical dimension for interconnect routing, with conductive structures extending through multiple transistor layers. This three-dimensional interconnect approach provides multiple routing paths through the vertical stack, ensuring robust connectivity without requiring proportional increases in lateral metal track area. Signals can be routed vertically between layers, reducing the need for extensive planar metal distribution networks.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The interconnect structures serve multiple functions simultaneously: they provide electrical connectivity between stacked transistor layers, act as shielding structures, and function as part of the power distribution network. This multi-functionality reduces the need for separate dedicated structures for each function, thereby maintaining comprehensive connectivity while minimizing the total device area occupied by interconnect infrastructure.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS11923364B2Double cross-couple for two-row flip-flop using CFET
Publication Date: 2024.03.05 TOKYO ELECTRON LTD
  • US11923364B2 patent drawing
  • US11923364B2 patent drawing
  • US11923364B2 patent drawing

AI summary

A semiconductor device includes a cell array having tracks and rows formed on a substrate. The tracks extend perpendicularly to the rows. A logic cell is formed across two adjacent rows within the cell array. The logic cell includes a cross-couple (XC) in each row and a plurality of poly tracks across the two adjacent rows. Each XC includes two cross-coupled complementary field-effect-transistors. Each poly track is configured to function as an inter-row gate for the XCs. A pair of signal tracks is positioned on opposing boundaries of the logic cell and electrically coupled to the plurality of poly tracks.