CFRP Resin Layer Structure for Low-Roughness Thermal Stability
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Solution Overview
Problem
Carbon fiber reinforced plastics (CFRPs) face challenges in achieving low surface roughness and are prone to deformation due to residual stress and thermal expansion differences when used in processing apparatuses, limiting their application in high-precision stages like exposure apparatuses.
Innovation Solution
A carbon fiber reinforced plastic structure is developed with a resin layer having a low surface roughness and similar thermal expansion coefficient to the CFRP member, reducing residual stress and deformation, and allowing for improved manufacturing productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a ceramic member is bonded to the surface of a CFRP member to reduce surface roughness, then surface roughness is improved, but residual stress causes deformation during grinding and temperature changes
Solution Approach 1:
The invention changes the material parameter from ceramic to resin that matches the thermal expansion coefficient of CFRP, eliminating the root cause of residual stress while maintaining the surface finishing function
Solution Approach 2:
The invention uses a composite structure of CFRP member with bonded resin layer, where the resin layer provides both the surface finishing function and thermal compatibility, avoiding the problems of ceramic bonding
2Strength
If a ceramic member is bonded to CFRP member using uncured prepreg adhesive, then bonding is achieved, but additional bonding steps reduce productivity
Solution Approach 1:
The invention merges the resin layer application with the CFRP manufacturing process itself, where the resin layer is formed as part of the CFRP structure rather than as a separate bonding operation, eliminating additional process steps
Solution Approach 2:
The resin layer serves dual functions: it provides the required surface roughness and simultaneously acts as the bonding medium, making the system self-sufficient and eliminating the need for separate adhesive bonding operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The structure achieves low surface roughness and reduced deformation, enabling its use in high-precision applications such as air-floating-type planar stages with enhanced thermal stability and productivity.
Implementation Method 1
the thermal expansion coefficient of CFRP and that of ceramics are different. Therefore, when the temperature is lowered after the heat treatment, as described above, residual stress occurs in the ceramic member adhered to the CFRP member
Data Source
AI summary
A carbon fiber reinforced plastic structure has a low surface roughness and has reduced deformation due to residual stress, changes in temperature, etc., and a processing apparatus that uses the structure, are disclosed. The carbon fiber reinforced plastic structure (CFRP structure) includes a carbon fiber reinforced plastic member (CFRP member), and a resin layer formed on a first surface of the carbon fiber reinforced plastic member, the resin layer including an opposite surface that is opposite to a surface facing the first surface, the opposite surface having a surface roughness that is less than a surface roughness of the first surface of the carbon fiber reinforced plastic member.