CFRP Structure With Resin Layer for Low-Roughness Precision Surfaces
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Carbon fiber reinforced plastic (CFRP) structures face challenges in achieving low surface roughness and reducing deformation due to residual stress and thermal expansion differences between CFRP and ceramic materials, which limits their use in high-precision applications like exposure apparatus stages.
Innovation Solution
A carbon fiber reinforced plastic structure is developed with a resin layer on its surface, which has a lower surface roughness than the CFRP itself. This resin layer is made of a room temperature curable resin, such as epoxy, to minimize residual stress and improve adhesion with the CFRP, allowing for finer surface processing without deforming the underlying CFRP.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a ceramic member is bonded to the CFRP member surface through heat treatment, then the surface roughness can be reduced, but residual stress occurs due to thermal expansion coefficient differences causing deformation
Solution Approach 1:
A resin layer is introduced as an intermediary between the CFRP member and the external environment. This resin layer has a thermal expansion coefficient matched to CFRP and serves as a buffer that absorbs thermal stress, preventing it from transferring to and deforming the ceramic member during grinding and polishing operations.
Solution Approach 2:
The thermal expansion coefficient parameter is carefully selected for the resin layer to match that of CFRP. By changing the material parameter (selecting appropriate resin composition), the system achieves thermal compatibility, eliminating the root cause of residual stress generation during temperature variations.
2Strength
If the gap between mobile object and sliding surface is reduced to several μm for higher rigidity, then the surface roughness must be reduced to 10 μm or less, but CFRP cannot achieve this precision alone
Solution Approach 1:
The invention creates a composite structure combining CFRP member, resin layer, and ceramic member. Each material contributes its superior properties: CFRP provides high rigidity and low weight, resin provides thermal stress buffering and adhesion, and ceramic provides the ultra-smooth surface finish (10 μm or less Ra) required for precision sliding contact.
Solution Approach 2:
The sliding surface structure is segmented into multiple functional layers rather than using a single material. The CFRP member forms the structural base, the resin layer forms an intermediate functional layer for stress management, and the ceramic member forms the surface contact layer for precision sliding, with each layer having optimized thickness and properties.
3Manufacturing precision
If ceramic member is ground and polished to reduce surface roughness, then the surface precision improves, but the ceramic member becomes thinner and stress balance is lost causing deformation
Solution Approach 1:
The resin layer is applied beforehand to the CFRP member surface before bonding the ceramic member. This resin layer acts as a cushioning layer that compensates for stress imbalances that will occur during subsequent ceramic grinding and polishing operations, preventing deformation even as the ceramic thickness is reduced to achieve high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting CFRP structure achieves a low surface roughness of 10 μm or less, reducing deformation due to residual stress and thermal changes, while maintaining the high rigidity, low density, and low thermal expansion characteristics of CFRP, thus enhancing its suitability for precision applications.
Implementation Method 1
the adhesive force of uncured prepregs is used to bond the CFRP member and the ceramic member
Implementation Method 2
the thermal expansion coefficient of CFRP and that of ceramics are different. Therefore, when the temperature is lowered after the heat treatment, as described above, residual stress occurs in the ceramic member adhered to the CFRP member
Data Source
AI summary
A carbon fiber reinforced plastic structure has a low surface roughness and has reduced deformation due to residual stress, changes in temperature, etc., and a processing apparatus that uses the structure, are disclosed. The carbon fiber reinforced plastic structure (CFRP structure) includes a carbon fiber reinforced plastic member (CFRP member), and a resin layer formed on a first surface of the carbon fiber reinforced plastic member, the resin layer including an opposite surface that is opposite to a surface facing the first surface, the opposite surface having a surface roughness that is less than a surface roughness of the first surface of the carbon fiber reinforced plastic member.