Chalcogen-Containing Switch Layer for Low Threshold Voltage

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Solution Overview

Problem

Resistance variable devices face challenges in lowering the threshold voltage for switching between high and low resistance states without compromising thermal stability of the switch layer.

Innovation Solution

A resistance variable device is designed with a chalcogen-containing layer having a specific composition, including elements like Sc, Y, Zr, Hf, C, Si, Ge, B, Al, In, S, Se, and Te, which functions as a switch layer, allowing for a rapid transition between resistance states while maintaining thermal stability by optimizing atomic fractions and oxidation numbers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional switch layer materials are used, then thermal stability is maintained, but threshold voltage remains high

Engineering Contradiction:
Improvethermal stabilityVSAvoidthreshold voltage
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies parameter changes by modifying the chemical composition of the switch layer, specifically incorporating chalcogen elements (S, Se, Te) in controlled atomic fractions (0.1-0.5) to alter the material's electrical and thermal properties, thereby reducing threshold voltage while preserving thermal stability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite materials by creating a multi-element system combining C1 (Sc, Y, Zr, Hf), C2 (C, Si, Ge, B, Al, Ga, In), and chalcogen elements (S, Se, Te) in a unified switch layer structure, where the synergistic interaction between different elements achieves both low threshold voltage and high thermal stability

Inventive Principle:
Principle #40Composite materials

2Speed

If threshold voltage is lowered for faster switching, then switching speed improves, but thermal stability deteriorates

Engineering Contradiction:
Improveswitching speedVSAvoidthermal stability
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The patent uses parameter changes by precisely controlling the atomic fractions of chalcogen elements (0.1-0.5) and optimizing the composition ratios of C1 and C2 elements to achieve a Sweet spot where switching speed is enhanced through lower threshold voltage while thermal stability is maintained through appropriate element selection and ratio control

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the threshold voltage for switching while enhancing thermal stability and reducing leakage current, ensuring reliable operation of the resistance variable device.

Implementation Method 1

a switch layer, which has a function of switching on/off of a current with respect to the resistance variable layer

Methodology Applied
Scientific EffectPhase transition: Phase Change

Data Source

PatentUS11600772B2Resistance variable device with chalcogen-containing layer
Publication Date: 2023.03.07 KIOXIA CORP
  • US11600772B2 patent drawing
  • US11600772B2 patent drawing
  • US11600772B2 patent drawing

AI summary

A resistance variable device of an embodiment includes a stack arranged between a first electrode and a second electrode and including a resistance variable layer and a chalcogen-containing layer. The chalcogen-containing layer contains a material having a composition represented by a general formula: C1xC2yAz, where C1 is at least one element selected from Sc, Y, Zr, and Hf, C2 is at least one element selected from C, Si, Ge, B, Al, Ga, and In, A is at least one element selected from S, Se, and Te, and x, y, and z are numbers representing atomic ratios satisfying 0<x<1, 0<y<1, 0<z<1, and x+y+z=1, and when an oxidation number of the element C1 is set to a, and an oxidation number of the element C2 is set to b, the atomic ratio x of the element C1 satisfies x≤(3−(3+b)×y−z)/(3+a).