Chalcogenide Selector Material for High Threshold Voltage and Low Leakage

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Solution Overview

Problem

Current memory devices face challenges in achieving high threshold voltage and low leakage current with chalcogenide materials, particularly as the thickness of the selector layer decreases, necessitating the development of novel chalcogenide compositions for compact and high-performance electronic devices.

Innovation Solution

A chalcogenide material composition including germanium (Ge), arsenic (As), selenium (Se) or tellurium (Te), and elements from Groups 2, 16, and 17, with specific atomic percentage ranges, is used as a selector in memory devices to enhance threshold voltage and reduce leakage current, incorporating dopants like beryllium (Be), sulfur (S), fluorine (F), chlorine (Cl), iodine (I), or bromine (Br) to improve performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the thickness of the selector layer is decreased to realize compact devices, then the device size is reduced, but the threshold voltage decreases and leakage current increases

Engineering Contradiction:
Improvedevice sizeVSAvoidthreshold voltage and leakage current
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent changes the chemical composition parameters of the chalcogenide material by introducing a fourth component (Groups 2, 16, or 17 elements) in addition to the traditional Ge-As-Se/Te system. This compositional parameter change enables the material to maintain high threshold voltage and low leakage current even when the selector layer thickness is reduced, thus resolving the contradiction between device compactness and electrical performance reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite chalcogenide material system by combining four components: germanium (Group 14), arsenic (Group 15), selenium or tellurium (Group 16), and a fourth component from Groups 2, 16, or 17. This composite material structure provides enhanced electrical properties that allow thin-film selectors to achieve both compact size and reliable switching characteristics with high threshold voltage and low leakage current

Inventive Principle:
Principle #40Composite materials

2Device complexity

If a traditional chalcogenide material composition is used, then the material structure is simple, but the threshold voltage is low and leakage current is high

Engineering Contradiction:
Improvematerial composition complexityVSAvoidthreshold voltage and leakage current
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent develops a composite chalcogenide material comprising four specific components: germanium (5-30 at%), arsenic (20-40 at%), selenium or tellurium (25-75 at%), and a fourth component from Groups 2, 16, or 17 (0.5-5 at%). This composite structure with controlled composition ranges achieves high threshold voltage and low leakage current, demonstrating that increased material complexity through composite design resolves the electrical performance limitations of traditional simpler compositions

Inventive Principle:
Principle #40Composite materials

3Reliability

If dopants from Groups 2, 16, and 17 are added to the chalcogenide material, then the threshold voltage increases and leakage current decreases, but the material composition becomes more complex

Engineering Contradiction:
Improvethreshold voltage and leakage currentVSAvoidmaterial composition
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent systematically varies the compositional parameters of the chalcogenide material by incorporating dopants from Groups 2, 16, or 17 at controlled concentrations (0.5-5 at%). This parameter optimization approach identifies the optimal doping levels that maximize threshold voltage and minimize leakage current while maintaining reasonable compositional complexity, thus resolving the contradiction between performance improvement and material complexity

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed chalcogenide material achieves higher threshold voltage and lower leakage current compared to traditional compositions, ensuring stable switching properties and thermal stability, suitable for thin-film devices and memory applications.

Implementation Method 1

the chalcogenide material may exhibit ovonic threshold switching properties

Methodology Applied
Scientific EffectOvonic threshold switching:

Data Source

PatentUS20220406842A1Chalcogenide material, device and memory device including the same
Publication Date: 2022.12.22 SAMSUNG ELECTRONICS CO LTD
  • US20220406842A1 patent drawing
  • US20220406842A1 patent drawing
  • US20220406842A1 patent drawing

AI summary

Provided are a chalcogenide material, and a device and a memory device each including the same. The chalcogenide material may include: germanium (Ge) as a first component; arsenic (As) as a second component; at least one element selected from selenium (Se) and tellurium (Te) as a third component; and at least one element selected from the elements of Groups 2, 16, and 17 of the periodic table as a fourth component, wherein a content of the first component may be from 5 at % to 30 at %, a content of the second component may be from 20 at % to 40 at %, a content of the third component may be from 25 at % to 75 at %, and a content of the fourth component may be from 0.5 at % to 5 at %.