Process Chamber Alignment Jig With Extendable Sensor Arm
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Solution Overview
Problem
Semiconductor process chambers face challenges in accurately determining the alignment of substrate supports with respect to outer structures like pre-heat rings, leading to potential damage and particle interference during device manufacturing, due to limited alignment measurement capabilities.
Innovation Solution
An alignment assembly is introduced, comprising a jig with an extendable arm and a guide rail assembly, allowing a sensor to be positioned above the interface between the substrate support and pre-heat ring, enabling precise measurement and adjustment of alignment through a lock mechanism and rotary joint, facilitating modular compatibility with various substrate and pre-heat ring configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed sensor position is used, then the device complexity is reduced, but the adaptability to different substrate support configurations is limited
Solution Approach 1:
The sensor is mounted on an extendable arm that can be positioned at multiple locations along its length and locked in place using a lock pin. This dynamic positioning capability allows the sensor to adapt to different substrate support configurations while maintaining a relatively simple overall device structure through modular components.
Solution Approach 2:
The alignment assembly is divided into modular components including a base arm, an extendable arm with multiple sections, and a sensor mount. This segmentation allows each component to be independently adjusted and positioned, providing versatility for different configurations without requiring complete redesign of the entire system.
2Measurement precision
If the sensor can be positioned at multiple locations, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The extendable arm allows the sensor to be dynamically positioned at multiple locations along its length, enabling precise measurement of alignment at different radial distances from the chamber center. The lock pin mechanism provides stable positioning at selected locations, ensuring measurement precision while keeping the adjustment mechanism simple.
Solution Approach 2:
The extendable arm serves as an intermediary between the fixed chamber structure and the sensor, allowing the sensor to reach multiple measurement positions without requiring complex mounting mechanisms directly on the chamber walls or substrate support.
3Strength
If the extendable arm is made rigid, then the structural strength is improved, but the ease of operation for positioning the sensor is reduced
Solution Approach 1:
The extendable arm is divided into multiple rigid sections that can be extended or retracted relative to each other. Each section maintains structural strength, while the segmented design allows the arm to be adjusted to different lengths using the guide rail assembly and lock pin mechanism, combining strength with operational flexibility.
Solution Approach 2:
The guide rail assembly acts as an intermediary mechanism between the operator's adjustment actions and the extendable arm positioning. The rail provides guided linear motion, making it easy to extend and retract the arm to precise positions while maintaining the arm's structural integrity during operation.
Data Source
AI summary
An alignment assembly includes a sensor and a lid that includes a first window. The alignment assembly also includes a rotary joint coupled to the lid. The alignment assembly also includes a jig coupled to the rotary joint and pivotable relative to the lid about the rotary joint. The jig includes an extendable arm that is moveable from a retracted position where the sensor is disposed in a first position above the first window to an extended position where the sensor is disposed at a second position above the first window. The alignment assembly also includes a lock configured to selectively pivotably lock the jig to the lid and also to selectively lock the extendable arm in the retracted position or the extended position.