Chamber Cleaning Apparatus Using Scroll Conveyance for TFT-LCD Exposure Machines
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Solution Overview
Problem
Current chamber cleaning technologies for exposure machines in TFT-LCD manufacturing are inefficient and disrupt the internal environment, leading to defects and reduced product quality due to manual cleaning and turbulence-induced air pressure and temperature changes.
Innovation Solution
A chamber cleaning apparatus with a controller, supplying device, and cleaning rail system that uses scrolls to convey and collect cleaning cloths, maintaining a controlled environment and avoiding turbulence, with automatic scroll substitution and recovery processes to enhance efficiency and reusability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual cleaning is performed by workers entering the chamber, then cleaning can be conducted, but particles are introduced into the exposure machine reducing cleaning effect
Solution Approach 1:
The cleaning apparatus enables the chamber to clean itself automatically through a robotic arm that enters and exits through the same opening used for substrate placement. The system performs cleaning operations without human intervention, using an integrated design where the cleaning tool is part of the exposure machine structure, thus avoiding contamination from external particles while maintaining cleaning effectiveness
Solution Approach 2:
A robotic arm serves as an intermediary between the cleaning function and the chamber environment. This automated mechanical arm can be precisely controlled to perform cleaning operations without introducing contaminants, acting as a mediator that eliminates the need for manual cleaning while preserving the cleaning capability
2Productivity
If dust collection equipment is used for cleaning, then cleaning can be performed, but strong airflow turbulence affects internal environment factors causing substrate deformation and patterning defects
Solution Approach 1:
The patent replaces the airflow-based dust collection system with a mechanical cleaning system. Instead of using strong air currents to remove particles, the system employs a robotic arm with a cleaning tool that physically removes particles through contact or proximity-based mechanisms, thereby eliminating turbulence-induced substrate deformation while maintaining cleaning effectiveness
Solution Approach 2:
The harmful turbulent airflow is extracted and removed from the cleaning process. The system separates the cleaning function from the airflow generation, using a dedicated mechanical cleaning apparatus that operates independently of the chamber's atmospheric conditions, thus preserving pattern alignment accuracy while achieving cleaning objectives
3Ease of operation
If artificial cleaning is performed, then cleaning can be conducted, but efficiency is low reducing product activation
Solution Approach 1:
The exposure machine is equipped with an integrated automatic cleaning system that performs cleaning operations autonomously without requiring manual intervention. The robotic arm can be programmed to execute cleaning routines automatically, significantly improving productivity and product activation by eliminating the time-consuming nature of manual cleaning operations
Solution Approach 2:
The cleaning system is designed to operate continuously or periodically without interrupting the overall manufacturing process. The robotic arm can perform cleaning operations between substrate processing cycles or during maintenance periods, ensuring continuous productivity improvement while maintaining ease of operation through automated control
Data Source
AI summary
The present disclosure relates to a chamber cleaning apparatus and a control method thereof. The chamber cleaning apparatus comprises: a controller for providing control signals, a supplying device, and a cleaning rail provided within the chamber. The supplying device has a first working position and a second working position, the first working position corresponding to a conveyance entrance, and the second working position corresponding to a conveyance outlet; the supplying device comprises at least two scrolls, and cleaning cloth partly on the cleaning rail; the scroll at the first working position is connected to one end of the cleaning cloth, for conveying the cleaning cloth from the conveyance entrance to the cleaning rail, and the scroll at the second working position is connected to the other end of the cleaning cloth, for collecting the cleaning cloth passing through the conveyance outlet.