Process Chamber Cleaning Sequence Control for Faster Recipe Updates
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Solution Overview
Problem
Conventional manufacturing systems face challenges in efficiently managing and updating cleaning processes for process chambers, leading to delayed implementation of substrate process recipes and reduced throughput due to the complexity and time required for adjusting or enhancing cleaning processes.
Innovation Solution
A method and system that provide a graphical user interface for users to manage and modify cleaning process sequences, allowing for the generation and execution of instructions based on user-provided cleaning operations and criteria, enabling direct implementation of updates without relying on external control logic management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional cleaning process management systems are used, then cleaning processes can be performed, but the time required to adjust and enhance cleaning processes is excessive
Solution Approach 1:
The system allows operators to independently adjust and enhance cleaning process sequences through a graphical user interface without requiring external control logic management or vendor support. The manufacturing system performs the cleaning process management functions itself, enabling self-service operation and reducing dependency on external systems.
Solution Approach 2:
The system pre-configures cleaning process sequences and criteria in a structured format that can be quickly modified and executed. By having the framework prepared in advance with defined sequences and trigger criteria, the system enables rapid adjustment when process changes are needed, eliminating time-consuming setup procedures.
2Ease of operation
If conventional cleaning process management is used, then cleaning operations can be performed, but the complexity of adjusting cleaning process sequences is high
Solution Approach 1:
The system introduces a graphical user interface as an intermediary layer between the operator and the complex cleaning process control logic. This interface simplifies the interaction by presenting cleaned-up views of process sequences and criteria, allowing operators to manage complexity without directly confronting the underlying system complexity.
Solution Approach 2:
The cleaning process management is divided into discrete, manageable components including sequences of operations and trigger criteria. Each component can be independently configured, viewed, and modified through the graphical interface, breaking down the overall complexity into segmented, easily manageable units.
3Reliability
If external control logic management is required for cleaning processes, then precise control can be achieved, but implementation time for updates is delayed
Solution Approach 1:
The manufacturing system performs cleaning process control internally without requiring external control logic management systems. This self-contained approach maintains precise control through integrated system logic while eliminating the communication and coordination delays associated with external systems.
Solution Approach 2:
The system merges the cleaning process control functionality directly into the manufacturing system's native control architecture. By combining what were previously separate functions (cleaning control and manufacturing control) into a unified system, the patent eliminates interface delays and enables immediate implementation of process updates.
Data Source
AI summary
Methods and systems for cleaning process sequence management are provided. An indication is received from a client device of a sequence of cleaning operations associated with a substrate process at a manufacturing system. An indication of one or more cleaning criteria that trigger initiation of the sequence of cleaning operations during a cleaning process at a process chamber of the manufacturing system is also received. A set of instructions corresponding to the sequence of cleaning operations is generated. In response to a detection that at least one of the one or more cleaning criteria is satisfied, the generated set of instructions are executed to initiate the sequence of cleaning operations at the process chamber.