Synchronizing Substrate Processing Chamber Conditioning
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Solution Overview
Problem
In multi-chamber substrate processing apparatuses, the asynchronous conditioning of process chambers leads to reduced throughput due to the inability to transfer substrates between chambers during conditioning, resulting in delayed film forming processes and inefficient use of processing time.
Innovation Solution
A method for synchronizing the conditioning of process chambers by setting a standby state for one chamber when another chamber reaches a predetermined integrated value, allowing for simultaneous conditioning and minimizing idle time, thereby optimizing the processing sequence and throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conditioning is performed in one process chamber, then the interior of that chamber is cleaned and pre-coated to maintain process quality, but substrate transfer to other chambers is blocked and throughput is reduced
Solution Approach 1:
The system performs preliminary assessment of conditioning requirements by integrating process values (substrate count, process time, process load) before conditioning is actually needed. This allows the control device to proactively schedule conditioning operations and coordinate substrate transfers in advance, minimizing disruption to throughput while ensuring process quality is maintained.
Solution Approach 2:
The conditioning determination device dynamically adjusts conditioning timing and duration based on real-time integration of process values from multiple chambers. Rather than using fixed schedules, the system continuously monitors and adapts conditioning decisions to current operational states, allowing optimal balance between quality maintenance and throughput preservation.
2Adaptability or versatility
If different kinds of film forming processes are consecutively performed in multiple chambers with different conditions, then process versatility is achieved, but conditioning cycles become unsynchronized and cause process interruptions
Solution Approach 1:
The system implements feedback mechanisms by continuously integrating process values (substrate count, process time, process load) from each chamber and using this information to determine optimal conditioning timing. The control device receives feedback from multiple chambers and adjusts conditioning schedules to coordinate operations across chambers, reducing interruptions while maintaining versatility for different film forming processes.
Solution Approach 2:
The integrated determination device serves multiple functions: it monitors process values from different chambers with different conditions, determines conditioning requirements for each chamber, coordinates substrate transfers, and optimizes overall system throughput. This universal control approach handles diverse film forming processes while synchronizing conditioning operations across chambers.
Data Source
AI summary
In a conditioning method conditions interiors of a plurality of process chambers of a substrate processing apparatus, conditioning of the interior of the first process chamber is performed if a first integrated value set in connection with the process of the substrate reaches a set value N1. The second process chamber is set in a standby state when the conditioning of the first process chamber starts and the series of processes is stopped. By determining whether a second integrated value set in connection with process of the substrate in the second process chamber is equal to or greater than a set value N2, count of a third integrated value in the second process chamber is started if the second integrated value is equal to or greater than the set value N2. A conditioning of the second process chamber is performed if the third integrated value exceeds a set value N3.