Diagnostic Disc Power Source for Vacuum and Heat Tolerance

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Solution Overview

Problem

Current methods for maintaining semiconductor processing chambers require venting and disassembly for diagnostics, leading to labor-intensive procedures, productivity loss, and potential contamination, as they rely on manual inspection rather than in-situ monitoring.

Innovation Solution

A diagnostic disc with non-contact sensors and a power source tolerant to vacuum and high temperatures, allowing for in-situ measurements and wireless communication within the processing chamber, enabling automated data collection and maintenance decisions without venting the chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual inspection methods are used for chamber component maintenance, then diagnostic accuracy can be ensured, but labor intensity increases and productivity decreases

Engineering Contradiction:

Improvediagnostic accuracyVSAvoidprocessing productivity

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The chamber components perform self-diagnosis through integrated sensors that automatically monitor their own condition parameters, eliminating the need for manual inspection while maintaining diagnostic accuracy and freeing up production time

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

Manual mechanical inspection is replaced by electronic sensing systems that automatically detect and report component conditions, transitioning from labor-intensive physical examination to automated electronic monitoring

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If the processing chamber is vented and disassembled for component inspection, then diagnostic accuracy improves, but contamination risk increases and requalification time increases

Engineering Contradiction:

Improvediagnostic accuracyVSAvoidchamber contamination

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

Component diagnostics are performed in advance while the chamber remains sealed and under vacuum conditions, using integrated sensors to detect component conditions before any venting or disassembly is required

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

Sensors act as intermediaries between the component and the diagnostic system, enabling indirect measurement of component conditions through electrical or optical signals without requiring physical access or chamber venting

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If conventional power sources are used in the diagnostic disc, then device complexity is reduced, but reliability decreases under vacuum and high temperature conditions

Engineering Contradiction:

Improvepower source complexityVSAvoidpower source reliability

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The power source is designed with modified operational parameters including vacuum-tolerant chemistry and extended temperature range specifications, allowing it to function reliably in the harsh chamber environment without requiring complex protective systems

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient, automated diagnostics and maintenance within the processing chamber, reducing downtime, preventing contamination, and improving processing yields by allowing continuous operation and real-time monitoring of chamber components.

Implementation Method 1

a wireless charger disposed on the PCB

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

at least one embedded non-contact sensor which allows in-situ measurements inside of a vacuum process chamber

Methodology Applied

Scientific EffectElectromagnetic radiation detection: Electromagnetic Induction

Data Source

PatentUS20230413446A1Diagnostic disc with a high vacuum and temperature tolerant power source

Publication Date: 2023.12.21 APPLIED MATERIALS INC

AI summary

A method includes causing, by a computing system comprising at least one processing device, a diagnostic disc placed within a processing chamber to generate sensor data of at least one component of the processing chamber using a set of non-contact sensors of the diagnostic disc, receiving, by the computing system, the sensor data from the diagnostic disc via a wireless connection established between the computing system and the diagnostic disc, determining, by the computing system based on the sensor data, whether at least one of alignment concentricity is skewed with respect to the at least one component, and in response to determining that at least one of alignment or concentricity is skewed with respect to the at least one component, initiating, by the computing system, correction of at least one of alignment or concentricity of the at least one component.