Chamber-Level Tool Error Detection for Semiconductor Process Yield
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Solution Overview
Problem
Conventional semiconductor manufacturing systems face decreased yield rates due to the need to terminate all chambers when a process error occurs in one chamber, leading to unnecessary interruptions in other chambers.
Innovation Solution
A system and method that allows for the detection of tool errors in a single chamber, enabling the process tool to stop only the affected chamber's recipe while continuing operations in other chambers, using a fault detection and classification system and an equipment automation program server to send specific commands via the SEMI Equipment Communication Standard to manage chamber states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If all chambers are terminated when a process error occurs in one chamber, then process safety and error containment are ensured, but productivity and yield rates decrease due to unnecessary interruptions in other chambers
Solution Approach 1:
The system segments the multi-chamber process tool into independent controllable units. Each chamber can be individually monitored, controlled, and terminated based on its own process state. The fault detection system identifies errors at the chamber level rather than tool level, allowing selective termination of only the affected chamber while maintaining operation in other chambers, thus resolving the contradiction between safety and productivity.
2Reliability
If all chambers are terminated when a process error occurs in one chamber, then complete error containment is achieved, but manufacturing costs increase due to lost production capacity
Solution Approach 1:
The system applies local quality control by implementing chamber-specific error detection and containment mechanisms. Instead of applying a blanket termination command to all chambers, the system locally addresses errors in the specific chamber where they occur. This localized approach maintains error containment while preserving production capacity in unaffected chambers, thereby reducing manufacturing costs.
3Stability of the object's composition
If centralized control terminates all chambers upon error detection, then system-wide consistency is maintained, but operational flexibility and responsiveness to local conditions are reduced
Solution Approach 1:
The control system transitions from a static all-or-nothing termination approach to a dynamic, adaptive control mechanism. The system continuously monitors process parameters in each chamber and dynamically adjusts control actions based on real-time conditions. When errors are detected, the system dynamically determines the appropriate response (continue, pause, or terminate) for each chamber individually, maintaining system-wide consistency while enabling operational flexibility and responsiveness to local conditions.
Data Source
AI summary
A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventing excursions.