Chamber Upper-Zone Temperature Control With Feedforward Cooling
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Solution Overview
Problem
Existing temperature control systems in chamber environments for plasma processing suffer from interference between heating and cooling units, leading to temperature control deviations and instability.
Innovation Solution
A temperature control apparatus and method that estimates the temperature of the chamber's upper portion using a heating member and compensates the cooling member with feedforward control, adjusting the refrigerant flow rate through a flow rate control valve based on the estimated temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heater and a chilling pipe are independently controlled to control the temperature of the upper portion of the chamber, then the temperature can be adjusted, but the heater and chilling pipe interfere with each other causing temperature control deviation
Solution Approach 1:
The patent implements a feedback control mechanism where the controller continuously monitors the actual temperature of the upper portion of the chamber and adjusts the heater and chilling pipe operations accordingly. This closed-loop feedback system eliminates temperature control deviations caused by interference between heating and cooling operations, ensuring stable and accurate temperature maintenance.
Solution Approach 2:
The patent applies preliminary action by pre-cooling the chamber before heater operation and pre-heating the refrigerant before chilling pipe operation. This preparatory措施 reduces the thermal shock and interference effects when switching between heating and cooling modes, thereby improving temperature control stability and preventing deviations.
2Speed
If the heater rapidly increases the temperature of the upper portion of the chamber, then the temperature response speed is improved, but the temperature stability deteriorates due to rapid changes
Solution Approach 1:
The patent employs periodic action by controlling the heater and chilling pipe to operate in alternating cycles rather than continuously. The controller switches between heating and cooling operations based on temperature thresholds, creating a periodic control pattern that achieves rapid temperature response while maintaining stability through rhythmic adjustment rather than continuous aggressive heating or cooling.
Solution Approach 2:
The patent applies dynamics by making the heater and chilling pipe operations adjustable and adaptive rather than fixed. The controller dynamically modifies the operation parameters (such as power level, duration, and timing) of both heating and cooling based on real-time temperature feedback, enabling the system to rapidly respond to temperature changes while automatically adjusting to maintain stability.
3Temperature
If the cooling speed is controlled according to temperature and refrigerant flow rate, then the cooling performance is improved, but the complexity of controlling the interaction between heater and chilling pipe increases
Solution Approach 1:
The patent merges the control of the heater and chilling pipe into a single integrated control system. The controller coordinates both heating and cooling operations simultaneously, managing refrigerant flow rate and heater power in unison based on temperature requirements. This unified control approach simplifies the overall system by eliminating the need for separate independent control mechanisms while maintaining optimal cooling and heating performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances temperature control performance by stabilizing the chamber's upper portion temperature quickly and precisely, reducing external disturbances and improving overall control accuracy.
Implementation Method 1
a heating unit including a heating member installed in an upper portion of the chamber and heating the upper portion of the chamber
Implementation Method 2
a cooling unit including a cooling member installed in the upper portion of the chamber and cooling the upper portion of the chamber
Data Source
AI summary
The present disclosure provides an apparatus and a method for controlling a temperature. Provided is the apparatus for controlling a temperature, including: a chamber having a processing space inside; a substrate support unit disposed in the chamber and supporting a substrate; a heating unit including a heating member installed in an upper portion of the chamber and heating the upper portion of the chamber; a cooling unit including a cooling member installed in the upper portion of the chamber and cooling the upper portion of the chamber; and a controller controlling the heating unit and the cooling unit.