Vacuum Chamber Floor Support Plate for Gap Consistency

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Solution Overview

Problem

Batch processing chambers face challenges in maintaining precise gap consistency and repeatability due to chamber floor deflection under low pressure and runout from motor assemblies, which affects the alignment and calibration of substrate supports in atomic layer deposition and chemical vapor deposition processes.

Innovation Solution

A processing chamber design incorporating a support plate, a support post, a motor, and a bellows assembly that allows the support post to extend through the chamber floor and separate the vacuum environment from atmospheric conditions, enabling movement of the chamber floor while maintaining alignment and preventing deflection-induced misalignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the chamber floor is directly mounted with the substrate actuator or motor assembly, then the device complexity is reduced, but the manufacturing precision deteriorates due to chamber floor deflection under low pressure

Engineering Contradiction:

Improvemounting structure complexityVSAvoidchamber matching precision

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The mounting structure is segmented into three distinct components: the chamber floor, the support plate mounted on the chamber floor, and the substrate actuator mounted on the support plate. This segmentation isolates the actuator from direct mounting on the deflection-prone chamber floor, while the support plate acts as a stable intermediate platform that maintains positioning precision even when the chamber floor deflects under vacuum conditions

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The support plate serves as an intermediary element between the chamber floor and the substrate actuator. It is mounted on the chamber floor but provides a stable reference plane for the actuator, effectively mediating the deflection forces and preventing them from affecting the actuator's positioning precision during vacuum operations

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If small gaps are used between substrate surface and gas distribution system, then productivity is improved by maximizing throughput, but the reliability deteriorates due to susceptibility to gap deviations

Engineering Contradiction:

ImprovethroughputVSAvoidprocess consistency

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The system incorporates feedback mechanisms through the stable support structure that maintains consistent gap spacing. The support plate provides a rigid reference that ensures the substrate actuator maintains precise positioning relative to the gas distribution system, creating a feedback loop where the structural stability continuously ensures gap consistency throughout the processing cycles

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The support plate and support post structure provides beforehand cushioning against potential gap deviations by establishing a stable mechanical reference frame before processing begins. This pre-established stable mounting ensures that even with small gaps, the system has built-in structural compensation that prevents gap deviations from affecting process consistency

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Ease of operation

If calibration is performed in atmospheric conditions, then ease of operation is improved, but the measurement precision deteriorates when applied to low pressure environment

Engineering Contradiction:

Improvecalibration accessibilityVSAvoidspacing calibration accuracy

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The support plate is pre-mounted on the chamber floor in atmospheric conditions, establishing a stable reference plane before vacuum operations begin. This preliminary mounting action creates a permanent structural relationship that maintains calibration accuracy across pressure transitions, allowing calibration to be performed easily in atmospheric conditions while ensuring precision is maintained during low pressure processing

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system dynamically adapts to pressure changes while maintaining calibration integrity. The support plate and chamber floor structure are designed to deflect together as a unified system under vacuum, maintaining their relative geometric relationships. This dynamic behavior ensures that calibration performed in atmospheric conditions remains accurate during low pressure operations, as the structural deflection is uniform and predictable

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS11501957B2Pedestal support design for precise chamber matching and process control

Publication Date: 2022.11.15 APPLIED MATERIALS INC

AI summary

Process chambers and methods for calibrating components of a processing chamber while the chamber volume is under vacuum are described. The process chamber includes a motor shaft connected to the process chamber with a plurality of motor bolts. A support plate is positioned under the chamber floor to accommodate for deflection of the chamber floor due to vacuum conditions within the chamber volume. A bellows assembly extending from the chamber floor to the support plate maintains vacuum conditions within the chamber.