Cluster Tool Chamber Electromagnetic Interference Timing Control
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Solution Overview
Problem
Current methods fail to effectively eliminate electromagnetic interference between adjacent processing chambers in cluster tools, leading to deposition rate and uniformity issues due to magnetic field overlap, with existing magnetic shields being bulky and ineffective.
Innovation Solution
A system controller is used to evaluate process recipes and determine optimal start times for each chamber to avoid temporal overlap of electromagnetic field generation, minimizing interference by controlling the timing of electromagnet power in adjacent chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If magnetic shields are used to reduce interference, then electromagnetic interference between chambers is reduced, but the shields become extraordinarily bulky, expensive and not serviceable
Solution Approach 1:
The system evaluates process recipes in advance to determine process windows for electromagnet operation before actual processing begins. The controller pre-calculates timing schedules that prevent electromagnetic interference, so no magnetic shields are needed during operation.
Solution Approach 2:
The system dynamically adjusts the timing of electromagnet operation in adjacent chambers based on real-time process requirements. The controller can flexibly modify process schedules to avoid overlapping electromagnetic fields while maintaining processing efficiency.
2Power
If large electric currents are used in electromagnets, then strong magnetic fields are generated for effective processing, but significant electromagnetic interference occurs between adjacent chambers
Solution Approach 1:
The system uses periodic electromagnet operation with carefully controlled duty cycles. Electromagnets are activated in alternating periods rather than simultaneously, allowing strong fields when needed while preventing continuous interference through rhythmic timing coordination.
Solution Approach 2:
The system maintains continuous processing productivity by ensuring that while one chamber's electromagnet is active, adjacent chambers are in non-interference modes. This continuous coordination allows uninterrupted processing without electromagnetic conflicts.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents magnetic field interference by synchronizing the start times of process recipes in adjacent chambers, ensuring consistent deposition rates and profiles without the need for bulky magnetic shields.
Implementation Method 1
With the application or use of an electromagnet (EM), the EM current can generate a strong field
Implementation Method 2
The magnetic field from one chamber can affect the magnetic field in an adjacent chamber, resulting in deposition rate, uniformity and/or deposition profile differences
Data Source
AI summary
Methods and apparatus to minimize electromagnetic interference between adjacent process chambers of a cluster tool are described. The start time of the subject recipe is controlled based on the electromagnetic process window of the subject process chamber, the electromagnetic window of the first adjacent process chamber and of an optional second adjacent process chamber. The start time of the subject process chamber is controlled to prevent temporal overlap of the electromagnetic window of the subject chamber with the electromagnetic window of an adjacent chamber.