Minimal-Contact Chamber Component Packaging for Particle Isolation
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Solution Overview
Problem
Chamber components in substrate process equipment are contaminated during transportation due to interaction with packaging materials, leading to unwanted particle deposition on critical surfaces, which can affect substrate processing and chamber component wear.
Innovation Solution
A polymer insert with an annular trench and ledge structure supports the chamber component without contacting its critical surfaces, and the component is vacuum-sealed in a polymer bag to prevent contamination and wear, using a polymer insert with an annular trench and ledge structure that keeps critical surfaces isolated from the packaging material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If chamber components are packaged in conventional packaging materials during transportation, then the components are protected from physical damage, but unwanted particles from the packaging materials contaminate the critical surfaces of the chamber components
Solution Approach 1:
A foam insert acts as an intermediary between the chamber component and the external environment. The insert includes a cavity that receives the chamber component and a closure member that seals the cavity, creating an isolated environment that protects the component from both physical damage and particle contamination during transportation
Solution Approach 2:
The critical surfaces of the chamber component are extracted from the external environment by placing them inside a sealed cavity. This isolation removes the component from harmful external factors such as packaging material particles while maintaining physical protection
2Manufacturing precision
If chamber components are handled and packaged in clean room environments, then initial cleanliness is maintained, but particle contamination occurs during transportation due to packaging material interaction
Solution Approach 1:
The chamber component is prepared in advance by placing it in a clean room environment to establish initial cleanliness. The foam insert and closure member are then assembled to seal the component inside, preserving the clean state achieved during manufacturing before transportation begins
Solution Approach 2:
The sealed foam insert creates an inert environment that isolates the chamber component from external contaminants during transportation. This enclosed space maintains the cleanliness established in the clean room by preventing interaction with packaging materials and external particles
3Device complexity
If packaging materials directly contact chamber components during storage and transport, then space utilization is maximized, but wear and particle migration occur on critical surfaces
Solution Approach 1:
The foam insert serves as a mediator between the chamber component and external packaging materials. It provides cushioning and protection while preventing direct contact between the component and potentially harmful packaging materials, thereby reducing wear and particle migration
Solution Approach 2:
The foam insert acts as a flexible protective shell that conforms to the chamber component. This flexible barrier prevents direct contact with external packaging materials while allowing for efficient space utilization during storage and transportation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents contamination and wear of chamber components by isolating critical surfaces from packaging materials, maintaining cleanliness and reducing particle migration during transport and processing.
Implementation Method 1
vacuum sealing the chamber component and the insert in the bag to clamp the chamber component between the bag and the one or more resting surfaces
Data Source
AI summary
Embodiments of packaged chamber components and methods of packaging chamber components are provided herein. In some embodiments, a packaged chamber component for use in a process chamber includes: an insert having an annular trench disposed about a raised inner portion, wherein the annular trench is disposed between the raised inner portion and an outer lip, wherein a ledge couples the raised inner portion to the outer lip, wherein the ledge includes a first portion and a second portion disposed radially outward of the first portion, and wherein the second portion includes a resting surface that extends upward and radially outward of an upper surface of the first portion; and a chamber component disposed in the annular trench of the insert and supported by the resting surface such that one or more critical surfaces of the chamber component are spaced apart from the insert.