Chamber Port Assembly with In-Situ Cleaning and Local Sensing
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Solution Overview
Problem
Existing substrate processing systems face challenges in efficient cleaning of chamber port assemblies and inaccurate measurement of process conditions, leading to prolonged downtime and measurement inaccuracies.
Innovation Solution
A chamber port assembly with integrated fluid delivery and sensing capabilities, including inlet ports, manifolds, and sensor ports, allows for in-situ cleaning and real-time condition monitoring, reducing downtime and improving measurement accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If traditional cleaning processes are used to clean chamber port assemblies, then cleaning can be performed, but chamber port cleaning time is lengthy and requires opening the process chamber, removing components, and adding cleaning jigs
Solution Approach 1:
The patent extracts the cleaning function from the main process chamber by providing a dedicated cleaning port that allows cleaning fluids to be introduced into the chamber port assembly without opening the process chamber. This separates the cleaning operation from the main processing environment, enabling quick cleaning without affecting the process chamber integrity.
Solution Approach 2:
The chamber port assembly is designed with self-cleaning capability through integrated cleaning ports and fluid distribution manifolds that allow cleaning fluids to directly access and flush the tunnel and interior surfaces. The system serves its own cleaning needs without requiring external cleaning jigs or chamber opening.
2Measurement precision
If bulk measurements are taken from the foreline of the substrate processing system, then residual gases can be sampled, but measurements do not capture conditions at specific locations in process chambers resulting in inaccuracy and lag time
Solution Approach 1:
The patent implements local measurement capability by providing sensor ports positioned at specific locations within the chamber port assembly, including within the tunnel that connects process chambers. This allows sensors to measure conditions (such as gas composition, temperature, or pressure) directly at the interface between chambers, providing localized rather than bulk measurements.
Solution Approach 2:
The chamber port assembly serves as an intermediary measurement location, positioned between the process chamber and the foreline. Sensors placed in the chamber port assembly capture conditions at this intermediate location, providing more accurate and timely information about process chamber conditions than remote foreline measurements alone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates frequent, efficient cleaning of chamber port assemblies without recalibration and recertification, and provides accurate real-time measurement of conditions, enhancing operational efficiency and precision.
Implementation Method 1
a manifold in fluid communication with the inlet port and having an outlet in fluid communication with the tunnel
Implementation Method 2
a sensor port in the body in communication with the tunnel for sensing, through the sensor port, at least one condition proximate to the tunnel
Data Source
AI summary
Methods and apparatus for a substrate processing system includes a chamber port assembly configured to connect between respective first and second chambers of a substrate processing system. The chamber port assembly includes a body with openings disposed on opposing sides of the body and a tunnel extending between the openings to facilitate passage of a substrate between the first and second chambers through the tunnel; an inlet port in the body; a manifold in fluid communication with the inlet port and having an outlet in fluid communication with the tunnel; and a sensor port in the body in communication with the tunnel.