Chamber Pre-coating Method for Particle Reduction
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Solution Overview
Problem
Existing film forming processes face challenges in minimizing the number of particles left on substrates due to particle generation from pre-coated chamber surfaces, necessitating a pre-coating method that reduces particle deposition during film formation.
Innovation Solution
A pre-coating method involving the sequential formation of multiple metal-containing films on the chamber's inner surface using specific gas compositions and flow rate ratios of metal source gases and hydrogen-containing gases, followed by a film forming method that matches the temperature and pressure conditions of the pre-coating process to enhance film adhesion and reduce particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a pre-coating film is formed on the chamber inner surface, then film adhesion is improved, but particle generation occurs during film forming
Solution Approach 1:
The pre-coating film is divided into multiple layers with different compositions and properties. The first pre-coating film has high adhesion to the chamber surface, while the second pre-coating film has low particle generation. This segmentation allows each layer to perform its specific function independently, resolving the contradiction between adhesion and particle generation.
Solution Approach 2:
The pre-coating structure uses composite materials with different characteristics. The first pre-coating film uses a material optimized for adhesion, while the second pre-coating film uses a material optimized for low particle generation. This composite approach allows the system to simultaneously achieve both high adhesion and low particle generation.
2Object-generated harmful factors
If multiple pre-coating films are formed sequentially, then particle generation is reduced, but process time increases
Solution Approach 1:
Instead of forming a single thick pre-coating film, the process uses multiple thin films with different functions. The first film provides sufficient adhesion, and the second film provides particle reduction, achieving the desired effect with thinner overall coating and reduced process time.
Solution Approach 2:
The process changes parameters such as gas composition, flow rates, and deposition conditions between forming the first and second pre-coating films. This allows optimization of each layer's properties while maintaining efficient deposition rates, reducing the time penalty of multi-layer formation.
3Strength
If hydrogen-containing gas flow rate is increased in the first gas, then film adhesion is enhanced, but metal source gas efficiency decreases
Solution Approach 1:
The gas composition is segmented between different deposition stages. The first gas has high hydrogen-containing gas content for adhesion, while the second gas has higher metal source gas content for efficient film formation. This segmentation allows optimization of gas composition for each specific function without compromise.
Solution Approach 2:
The process dynamically changes gas flow rate parameters between forming the first and second pre-coating films. The hydrogen-containing gas flow rate is optimized for adhesion in the first film, while the metal source gas flow rate is optimized for efficiency in the second film, resolving the efficiency-loss contradiction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces the number of particles on substrates by enhancing film adhesion to the chamber surface and maintaining consistent film quality, thereby improving the efficiency of the film forming process.
Implementation Method 1
forming a first film on the inner surface by supplying a first gas including a metal source gas and a hydrogen-containing gas to the internal space
Implementation Method 2
a temperature of the support base in the act of forming the fifth film is set to be equal to a temperature of the support base in the act of forming the metal-containing film
Data Source
AI summary
A method of pre-coating an inner surface of a chamber, which includes a surface of a substrate-supporting support base installed in an internal space in the chamber, includes: forming a first film on the inner surface by supplying a first gas; forming a second film on the first film by supplying a second gas; and forming a third film on the second film by supplying a third gas, wherein a flow rate ratio of a hydrogen-containing gas to a metal source gas in the first gas is set to be higher than flow rate ratios of the hydrogen-containing gas to the metal source gas in the second gas and the third gas, and wherein the flow rate of the metal source gas in the first gas is set to be lower than the flow rates of the metal source gas in the second gas and the third gas.