Chamber Purifier with Light Shield for Substrate Treatment
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Solution Overview
Problem
The challenge in the development of display devices is the contamination of substrates due to moisture and oxygen in the treatment chamber, which can degrade the substrate's properties and lead to product defects, and existing solutions fail to efficiently purify the air and maintain a stable atmosphere during the manufacturing process.
Innovation Solution
An apparatus is designed with a chamber, a substrate treater, a purifier, a light source, and a light-shield, where the purifier includes a moisture absorption portion using molecular sieves and an oxygen removal portion with a copper catalyst, and the light source irradiates ultraviolet, infrared, or microwaves to aid in air purification, while the light-shield prevents direct light exposure to the substrate treater, and additional features like a heater and sub-chamber with atmosphere control are included to manage the environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the chamber is sealed to maintain atmosphere, then substrate contamination is reduced, but purification efficiency decreases
Solution Approach 1:
The purifier operates continuously within the sealed chamber to maintain atmosphere purity without requiring chamber opening, enabling continuous substrate treatment while preventing contamination. The light source also operates continuously to assist purification through photodissociation of remaining air molecules.
Solution Approach 2:
The purifier acts as an intermediary system that maintains the sealed atmosphere by continuously removing contaminants. The light-shield serves as an intermediary that protects the substrate treater from direct light exposure while allowing the light source to purify the atmosphere.
2Productivity
If light source irradiates to purify air, then purification efficiency increases, but substrate treater is damaged by direct light
Solution Approach 1:
The light-shield creates localized protection for the substrate treater while allowing light to act on the atmosphere. The shield is positioned to block light paths to the substrate treater while leaving other paths open for atmospheric purification.
Solution Approach 2:
The light-shield serves as an intermediary element that selectively blocks light from reaching the substrate treater while allowing light to pass through and purify the chamber atmosphere. It mediates between the light source's purification function and the substrate treater's protection requirement.
3Manufacturing precision
If moisture and oxygen are removed continuously, then substrate quality improves, but takt time increases
Solution Approach 1:
The purifier and light source are activated before substrate treatment begins to pre-establish a purified atmosphere. This preliminary purification reduces the need for extended purification during treatment, minimizing impact on takt time while ensuring substrate quality.
Solution Approach 2:
The atmosphere purification operates continuously at a controlled rate that maintains substrate quality without creating bottlenecks in the manufacturing process. The system is designed to achieve the required purification level within the available takt time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This apparatus effectively removes moisture and oxygen from the chamber, enhances purification efficiency, and maintains a stable atmosphere, reducing takt time and improving operating efficiency by desorbing and purifying remaining air molecules, thus preventing substrate degradation and improving the overall manufacturing process.
Implementation Method 1
The moisture absorption portion may include a first filter, the first filter including a moisture absorbent. The moisture absorbent may be a molecular sieve.
Implementation Method 2
The oxygen removal portion may include a second filter, the second filter including a copper catalyst.
Implementation Method 3
The light source may irradiate ultraviolet light, infrared light, or microwaves.
Data Source
AI summary
An apparatus for treating a substrate, including a chamber; a substrate treater in the chamber; a purifier connected to the chamber, the purifier to purify polluted air in the chamber; a light source in the chamber, the light source to irradiate light; and a light-shield to block the light irradiated by the light source from arriving at the substrate treater.