Semiconductor Chamber Temperature Control via Sensor Mode Switching
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Solution Overview
Problem
Existing temperature control systems for semiconductor manufacturing processes face issues due to inappropriate temperature detection states, such as abnormal heating, when using a temperature sensor that moves with a retainer, leading to inefficiencies and potential inaccuracies.
Innovation Solution
A system that switches between a first control mode using a heater temperature sensor and a second control mode using a retainer temperature sensor based on the state of the retainer, ensuring accurate temperature control during substrate processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor moves with the retainer to detect temperature during substrate processing, then temperature control during retainer elevation or lowering is improved, but inappropriate states such as abnormal heating may occur due to inappropriate sensor positions
Solution Approach 1:
The patent applies dynamics by making the temperature sensor movable rather than fixed. The sensor can dynamically change its position along the retainer to match different operational states (elevation, lowering, processing), ensuring appropriate temperature detection at each stage and preventing abnormal heating conditions.
Solution Approach 2:
The patent changes the spatial parameter of the temperature sensor's position based on operational conditions. By adjusting the sensor's location along the retainer according to whether the system is in elevation mode, lowering mode, or processing mode, the patent optimizes temperature measurement accuracy for each specific operational state.
2Device complexity
If a fixed temperature sensor is used in the process chamber, then temperature control during processing is simplified, but temperature control becomes inappropriate when the retainer is being elevated or lowered
Solution Approach 1:
The patent transforms a static temperature sensing system into a dynamic one. The temperature sensor is mounted on the retainer and can move with it, allowing the sensor to maintain appropriate positioning during retainer elevation, lowering, and processing operations, thereby improving measurement precision across all operational states.
3Speed
If temperature control is continuously adjusted during retainer movement, then temperature responsiveness is improved, but inappropriate positioning may cause abnormal heating
Solution Approach 1:
The patent applies preliminary action by pre-positioning the temperature sensor at appropriate locations on the retainer before operations begin. The sensor is strategically placed to detect temperatures at critical points during elevation, lowering, and processing, enabling proactive temperature control that prevents abnormal heating before it occurs.
Solution Approach 2:
The patent implements feedback control where the movable temperature sensor continuously monitors temperature at its current position on the retainer, and this information feeds back to the control system. The control system adjusts heating based on real-time temperature data from the sensor's actual position, preventing abnormal heating through responsive feedback control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise temperature control by selecting the appropriate sensor based on the retainer's state, reducing inaccuracies and enhancing process stability and efficiency in semiconductor manufacturing.
Implementation Method 1
a first control mode in which an inner temperature of a process chamber is controlled based on a temperature detected by a first temperature sensor provided at a heater, and a second control mode in which the inner temperature of the process chamber is controlled based on a temperature detected by a second temperature sensor provided at the retainer
Data Source
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AI summary
Provided is technology that makes it possible to switch between a plurality of temperature sensors and perform temperature control. The present invention comprises a first control mode that controls the temperature in a processing chamber on the basis of the temperature detected by a first temperature sensor positioned at a heating portion, a second control mode that controls the temperature in the processing chamber on the basis of the temperature detected by a second temperature sensor provided to a holding tool for holding a substrate, and a switching unit that is configured to be capable of switching between the first control mode and the second control mode so that temperature control is executed in accordance with a state of the holding tool.