Substrate Processing Chamber Aging via Test Substrate Inspection
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Solution Overview
Problem
The existing substrate-processing apparatuses face productivity reduction due to the need for periodic inspection and maintenance, which delays the input of real substrates into the system, leading to idle times and reduced semiconductor device manufacturing efficiency.
Innovation Solution
A substrate-processing system and method that allow for an auto-inspection process using a test substrate to be performed before the arrival of the receiving container, utilizing a host computer to control the distribution automation apparatus and controller to shut down a process chamber and load the test substrate during idle times, thereby performing inspections ahead of the scheduled substrate arrival.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If inspection process is performed after receiving container arrives on load port, then inspection can be conducted using real substrates, but productivity is reduced due to delayed input of real substrates
Solution Approach 1:
The patent applies preliminary action by performing the inspection process using a test substrate before the receiving container with real substrates arrives at the load port. The host computer provides advance information about the scheduled arrival, and the controller initiates the inspection process during the idle time, preparing the process chamber in advance so that real substrates can be loaded immediately upon arrival, thus maintaining both inspection reliability and productivity
2Productivity
If inspection process is performed before receiving container arrives, then productivity is improved by reducing idle time, but real substrates cannot be used for inspection
Solution Approach 1:
The patent applies the copying principle by using a test substrate that replicates the characteristics and requirements of real substrates for the inspection process. The test substrate serves as a copy that allows the inspection to be performed with the same procedures and criteria that would be applied to real substrates, thereby maintaining inspection reliability while enabling the inspection to occur during idle time before real substrates are available
3Reliability
If apparatus is shut down for inspection process, then inspection can be performed thoroughly, but processing time is lost
Solution Approach 1:
The patent applies preliminary action by scheduling and executing the inspection process during the idle time period before the receiving container arrives at the load port. The host computer provides advance information about the scheduled arrival time, and the controller utilizes this idle time to perform the complete inspection process using a test substrate, so that when real substrates arrive, the apparatus is already prepared and can immediately begin processing without time loss
Data Source
AI summary
A method of aging a substrate-processing apparatus according to the inventive concepts may include receiving advance information of a scheduled substrate-receiving container to be loaded on a load port of the substrate-processing apparatus from a host computer, and loading a test substrate into a process chamber to perform an inspection process by means of the advance information.