Semiconductor Chamber Isolation Window Fixing Structure
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Solution Overview
Problem
In semiconductor manufacturing, the quartz window in degas chambers is prone to breakage due to alternating pressure and temperature-induced deformation of the resin pad, leading to collisions with the chamber side wall and uneven force distribution.
Innovation Solution
A chamber design featuring an isolation window fixing structure with a first and second fixing part, connected via fasteners and washers, securely attaches the isolation window to the chamber body, preventing vertical and horizontal displacement and eliminating the need for a resin pad, thus preventing collisions and uneven force application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a resin pad is used to support the quartz window, then the window can be positioned and supported, but the resin pad deforms under alternating pressure and temperature, causing the window to collide with the chamber wall and break
Solution Approach 1:
The patent changes the material parameter from soft resin pad to hard metal fixing structure, which maintains dimensional stability under pressure and temperature variations, preventing window deformation and collision
Solution Approach 2:
The fixing structure is divided into multiple components including fixing plate, fixing ears, and connection bolts, allowing for precise positioning and secure attachment of the quartz window to the chamber wall
2Reliability
If a quartz window press ring is added to apply preload, then the window moving space is confined and collision is prevented, but the structure complexity increases and the resin pad still deforms under heat
Solution Approach 1:
The patent combines the support and fixing functions into an integrated metal fixing structure that replaces both the resin pad and press ring, achieving window stabilization while simplifying the overall device structure
Solution Approach 2:
The patent extracts and eliminates the resin pad component entirely, using only the metal fixing structure to provide both support and constraint functions, thereby removing the source of thermal deformation
3Device complexity
If the quartz window is only supported by the resin pad without vertical fixation, then the structure is simple, but the window moves vertically under alternating pressure and collides with the chamber wall
Solution Approach 1:
The patent creates a dynamic fixing system where the metal fixing structure can accommodate thermal expansion and pressure variations while maintaining constant constraint on the quartz window, preventing collision during pressure cycles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively secures the isolation window, preventing damage from pressure and temperature variations, ensuring the window's integrity and maintaining chamber tightness through balanced force distribution and heat dissipation.
Implementation Method 1
ensuring the window's integrity and maintaining chamber tightness through balanced force distribution
Implementation Method 2
ensuring the window's integrity and maintaining chamber tightness through balanced force distribution and heat dissipation
Data Source
AI summary
Embodiments of the invention provide a chamber for semiconductor processing, which includes a chamber body and an isolation window, the chamber body being of a tubby structure and having an upper end which is an open end, and the isolation window being arranged at the open end of the chamber body and used for sealing the chamber. The chamber further includes an isolation window fixing structure used for fixing the isolation window at the open end of the chamber body and a first fixing part and a second fixing part connected with each other, the first fixing part being fixedly connected with an edge area of an upper surface of the isolation window, and the second fixing part being fixedly connected with the chamber body.