Chamberless Semiconductor Tester Parallel Soak and Index
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Solution Overview
Problem
Conventional semiconductor testing protocols are inefficient due to significant soak and index times, which increase the overall testing time and reduce the throughput of semiconductor testers, leading to idle equipment and reduced return on investment.
Innovation Solution
The method involves using a chamberless single insertion model or asynchronous insertion model handler that divides semiconductor devices into subgroups, allowing for simultaneous heating and testing, thereby reducing or eliminating soak time and index time by executing multiple testing sequences in parallel, and utilizing thermal chucks with feedback control for active temperature management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional semiconductor testing protocols are used with sequential processing, then testing can be performed on semiconductor devices, but significant soak and index times are required which increase overall testing time and reduce throughput
Solution Approach 1:
The patent divides the semiconductor device group into multiple subgroups and segments the testing process into parallel sequences. Multiple testing sequences are executed simultaneously on different subgroups, allowing the tester to continuously test one subgroup while other subgroups undergo soaking and indexing operations. This segmentation eliminates idle time and masks soak and index times, significantly improving throughput while reducing overall testing time.
2Reliability
If the tester waits for devices to reach designated temperature before testing, then accurate temperature-dependent testing can be performed, but this creates idle equipment time and reduces return on investment
Solution Approach 1:
The patent performs preliminary actions by dividing devices into subgroups and pre-positioning them for parallel processing. While one subgroup is being tested at the designated temperature, other subgroups are simultaneously being soaked and indexed in advance. This preliminary preparation of multiple subgroups ensures that testing accuracy is maintained while eliminating equipment idle time, as the tester continuously has ready-to-test subgroups available.
Solution Approach 2:
The patent implements continuous useful action by executing multiple testing sequences in parallel without idle periods. The tester continuously tests one subgroup while other subgroups undergo soaking and indexing simultaneously. This parallel processing eliminates equipment idle time and ensures continuous productive operation, maintaining both testing accuracy and high equipment utilization.
3Productivity
If multiple testing sequences are executed in parallel with subgroup division, then throughput is increased and soak time is masked, but the system complexity increases
Solution Approach 1:
The patent manages system complexity by segmenting devices into subgroups with identical pin mappings and TDR calibration data. This segmentation allows independent parallel processing of multiple subgroups while maintaining manageable control complexity. Each subgroup can be handled and tested independently, simplifying the coordination requirements compared to managing a single large group sequentially.
Solution Approach 2:
The patent applies universality by creating subgroups with identical characteristics (pin mappings, TDR calibration data) that can be interchangeably tested on the same tester. This multi-functionality allows the tester to process any subgroup in any position, simplifying the control logic while enabling parallel processing. The identical nature of subgroups reduces the complexity of coordination compared to handling diverse device configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces overall testing time, increases throughput, and optimizes the use of equipment, allowing for continuous operation and improved return on investment by masking soak and index times, thereby enhancing productivity and reducing potential damage to semiconductor devices.
Implementation Method 1
heating the first portion of the first subgroup and the first portion of a second subgroup from ambient temperature to a stabilized designated temperature during a soak time
Implementation Method 2
utilizing thermal chucks with feedback control for active temperature management
Data Source
AI summary
Methods are provided that performs continuous semiconductor testing during long soak time testing using a chamberless single insertion model (SIM) handler and also using a chamberless asynchronous insertion model (AIM) handler having two manipulators. The methods include dividing a group of semiconductors having an ambient temperature into a first subgroup having a plurality of portions and a second subgroup having a plurality of portions, the second subgroup being identical to the first subgroup. The methods also include using thermal chucks to change the temperature of the first portion of the first subgroup and the first portion of a second subgroup prior to testing from ambient temperature to a stabilized designated temperature during a soak time. The methods also include testing all of the portions of the first subgroup and the second subgroup using predetermined protocols that include Soak Time, Test Time, Index Time, and sometimes Wait Time.