Chamfered Superstrate Edge Coating for Inkjet Planarization

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Solution Overview

Problem

The existing inkjet adaptive planarization process often results in extrusions of formable material beyond the edge of the superstrate, which accumulate and cause defects when processing subsequent substrates due to the tendency of extruded material to remain on the superstrate and break off during separation.

Innovation Solution

A superstrate with a chamfered edge coated with an opaque layer that has a reflectance of visible light greater than 30% and an absorbance of UV light greater than 70%, preventing the curing of extruded material on the edge and allowing its evaporation, thereby preventing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the superstrate is used for inkjet adaptive planarization, then the surface can be formed with desired shape characteristics, but extrusions of formable material can occur at the edge and accumulate on the superstrate

Engineering Contradiction:

Improvesurface shape characteristicsVSAvoidextrusion defects

Core Design Contradiction:

Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent applies a coating layer specifically to the chamfered edge region of the superstrate, creating a localized property difference. This coating has different optical characteristics (higher UV absorbance) compared to the bulk superstrate material, preventing curing of extruded material only at the critical edge region where extrusions occur, while maintaining the overall planarization function.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The coating layer acts as an intermediary between the extruded formable material and the superstrate body. It blocks UV actinic radiation from reaching and curing the extruded material, preventing the material from adhering to the superstrate and causing defects in subsequent processing.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If the extruded material is cured by UV light, then the planarization layer can be formed, but the cured extruded material remains on the superstrate and causes defects

Engineering Contradiction:

Improveplanarization layer formationVSAvoiddefect-free processing

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent creates a localized optical property difference by coating only the chamfered edge region with a layer having high UV absorbance. This selective coating prevents curing of extruded material at the edges while allowing proper curing of the planarization layer in the central region, thus maintaining reliability without compromising manufacturing precision.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent converts the harmful effect of UV light (which causes extruded material to cure and adhere to the superstrate) into a beneficial effect by using the same UV light to selectively cure only the desired planarization layer while the coating prevents curing of extrusions. The UV light becomes useful for planarization while being blocked where harmful.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Reliability

If a coating layer is added to the chamfered edge, then extrusion defects can be prevented, but the device complexity increases

Engineering Contradiction:

Improveprevention of extrusion defectsVSAvoidsuperstrate structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

Rather than modifying the entire superstrate structure, the patent applies a coating layer only to the chamfered edge region where extrusions occur. This localized approach prevents extrusion defects without requiring complex structural modifications to the entire superstrate, thus improving reliability with minimal increase in device complexity.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The coating layer can be applied as a relatively simple, cost-effective treatment to the chamfered edge. While it adds a layer to the superstrate, this is a minor modification compared to redesigning the entire superstrate structure, representing a low-cost solution to prevent extrusion defects.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents extrusion defects by blocking actinic radiation from curing the material on the chamfered edge, ensuring that the extruded material evaporates instead of solidifying and causing damage during subsequent processing.

Implementation Method 1

an absorbance of UV light that is greater than 70%

Methodology Applied

Scientific EffectAbsorbance of UV light: Absorption (EM radiation)

Implementation Method 2

a reflectance of visible light that is greater than 30%

Methodology Applied

Scientific EffectReflection of visible light: Reflection

Implementation Method 3

curing the formable material on the substrate to form the planarization layer

Methodology Applied

Scientific EffectCuring of formable material: Photopolymerisation

Data Source

PatentUS12195382B2Superstrate and a method of using the same

Publication Date: 2025.01.14 CANON KK

AI summary

A superstrate for forming a planarization layer on a substrate can include a body having a first surface, a second surface opposite the first surface, and a chamfered edge between the first surface and the second surface. An opaque layer can coat the chamfered edge. In another embodiment, an opaque layer can coat the chamfered edge and a portion of the second surface. The superstrate can be used for more planarization or other processing sequences without causing extrusion defects.