Charged-Particle Beam Displacement Detection With Radial Rails
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Solution Overview
Problem
Charged particle beam systems suffer from lateral positional drift, leading to beam misalignment and poor performance, which conventional techniques like raster beam scanning and mapping are inefficient in detecting and correcting.
Innovation Solution
A lateral beam shift detector for charged particle microscopes, comprising an aperture and radially extending rails or plates, detects beam displacement by collecting charged particles or secondary electrons, allowing for efficient alignment of the beam before or during imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional raster beam scanning and mapping techniques are used to detect beam misalignment, then beam alignment can be detected, but the detection process is inefficient and time-consuming
Solution Approach 1:
The detector is divided into multiple discrete rails or segments arranged radially around the aperture. Each rail independently detects charged particles in its specific angular range, allowing parallel measurement of beam position across different sectors simultaneously, thus enabling fast and accurate beam alignment detection without time-consuming scanning
Solution Approach 2:
The patent replaces the mechanical raster scanning system with a stationary detector comprising multiple rails that simultaneously detect beam position. Instead of mechanically moving the beam or detector to map alignment, the system uses multiple fixed detection elements that provide instantaneous position information through electronic signal processing
2Measurement precision
If beam alignment is corrected by interrupting imaging or processing, then proper alignment can be achieved, but productivity is reduced
Solution Approach 1:
The detector operates continuously during imaging and processing without interruption. The multiple rails provide ongoing beam position monitoring, allowing alignment corrections to be made while maintaining continuous imaging or processing operations, thus preserving productivity while ensuring beam alignment accuracy
Solution Approach 2:
The system provides real-time feedback on beam position through the multiple rails detecting charged particles simultaneously. This continuous feedback enables dynamic alignment adjustments during imaging or processing operations, maintaining proper beam alignment without interrupting the useful work being performed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The detector enables time-efficient detection and correction of lateral beam displacement, improving beam alignment without interrupting imaging or processing, and can be integrated into charged particle microscopes for real-time monitoring and adjustment.
Implementation Method 1
a plurality of rails arranged in a first plane extending radially outward from the aperture, wherein each of the plurality of rails is configured to detect charged particles from the charged particle beam
Data Source
AI summary
Detectors, systems, and methods for detecting lateral beam displacement for a beam microscopy system are described herein. In one aspect, a detector can include an aperture for allowing a charged particle beam passing through the detector and irradiating a sample; and a plurality of rails arranged in a first plane extending radially outward from the aperture, wherein each of the plurality of rails is configured to detect charged particles from the charged particle beam before irradiating the sample.