Charged Particle Evaporation Deposition for OLED Color Mixing

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

In OLED display panels, the evaporation deposition method for forming organic light-emitting layers results in color mixing issues due to non-directional diffusion of deposition material particles, leading to unwanted deposition outside target areas and reduced material utilization.

Innovation Solution

An evaporation deposition equipment and method that uses a vaporizing unit to generate charged vapor-depositing material particles, guided by an electric field formed between the anode layer and an electrode plate, ensuring precise deposition within target areas on the array substrate, reducing color mixing and material loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional evaporation deposition method is used to form organic light-emitting layers, then the process is simple and easy to control film thickness, but deposition material particles diffuse non-directionally causing color mixing outside target areas

Engineering Contradiction:
Improvesimplicity of evaporation deposition processVSAvoiddeposition accuracy within target areas
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces the conventional thermal evaporation mechanism with a field-based mechanism. An electric field is applied between the evaporation source and substrate to charge and direct the deposition particles, substituting purely thermal/mechanical evaporation with a field-controlled process that enables directional deposition while maintaining process simplicity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state and properties of deposition particles by charging them through an electric field. This parameter change from neutral to charged particles enables directional control and prevents non-directional diffusion, solving the color mixing problem while preserving the ease of the evaporation deposition process

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If masks are used to block deposition material particles during sequential evaporation of red, green, and blue organic light-emitting materials, then different colors can be deposited sequentially, but particles still deposit outside target areas due to gap between masks and substrate causing color mixing

Engineering Contradiction:
Improvecapability to deposit different colors sequentiallyVSAvoiddeposition precision avoiding color mixing
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical mask blocking system with an electric field guiding system. Instead of relying on physical masks that have gaps and alignment issues, charged particles are directed along electric field lines to the precise target areas on the substrate, eliminating color mixing while maintaining sequential deposition capability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an electric field as an intermediary between the evaporation source and substrate. This electric field acts as a mediator that guides charged deposition particles along specific paths to the target areas, replacing the need for physical masks and preventing particles from depositing in wrong locations

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If vapor-depositing material particles are heated and evaporated in vacuum environment without directional control, then the process is simple, but material utilization is reduced due to non-directional diffusion and deposition outside target areas

Engineering Contradiction:
Improvesimplicity of vacuum evaporation processVSAvoidmaterial utilization efficiency
Core Design Contradiction:
Ease of manufactureVSLoss of substance

Solution Approach 1:

The patent changes the electrical parameter of deposition particles from neutral to charged state. This enables the particles to respond to electric fields and be directed precisely to target areas, preventing non-directional diffusion and reducing material waste while keeping the vacuum evaporation process simple

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent substitutes the uncontrolled thermal diffusion mechanism with an electric field-guided transport mechanism. Charged particles follow electric field lines to reach target areas efficiently, eliminating random diffusion and improving material utilization without complicating the manufacturing process

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents deposition outside target areas, reduces color mixing, and enhances material utilization, improving the efficiency and cost-effectiveness of the OLED panel manufacturing process.

Implementation Method 1

the crucible is used for heating a vapor-depositing material to vaporize the vapor-depositing material to form vapor-depositing material particles

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

the vapor-depositing material particles are ejected from the nozzle and rubbed against the nozzle to form the charged vapor-depositing material particles

Methodology Applied
Scientific EffectFriction charging: Triboelectric Effect

Implementation Method 3

an electric field forming unit, electrically connected to the array substrate and the electrode plate, for forming an electric field between the anode layer and the electrode plate, the electric field guiding the charged vapor-depositing material particles towards the array substrate

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 4

the vapor-depositing material particles are ejected from the nozzle and rubbed against the nozzle to form the charged vapor-depositing material particles... to deposit to form an organic light-emitting layer

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS10541386B2Evaporation deposition equipment and evaporation deposition method
Publication Date: 2020.01.21 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD
  • US10541386B2 patent drawing
  • US10541386B2 patent drawing

AI summary

The invention provides an evaporation deposition equipment and method, applicable to vapor-depositing an organic light-emitting layer on an array substrate with a formed anode layer, the evaporation deposition equipment comprising: a first platform, disposed with an electrode plate; a second platform, disposed above the first platform, for carrying the array substrate; a vaporizing unit, disposed at the electrode plate, for generating charged vapor-depositing material particles and spraying the charged vapor-depositing material particles towards the array substrate; a mask carrier, for fixing a mask with opening pattern between the array substrate and the vaporizing unit; an electric field forming unit, electrically connected to the array substrate and the electrode plate, for forming an electric field between the anode layer and the electrode plate, the electric field guiding the charged vapor-depositing material particles towards the array substrate to deposit to form an organic light-emitting layer corresponding to the opening pattern.