Charged Particle Radiation Device Bandpass Detection
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Solution Overview
Problem
Existing charged particle radiation devices face challenges in performing simple and efficient band-pass detection of electrons with energies between 1 kV and 200 kV, as previous methods are either ineffective or require complex configurations with high voltage power sources and three-dimensional obstacles.
Innovation Solution
A charged particle radiation device is configured with a conductive film between the sample and the aperture, and an electron detector with a sensing surface angled between 30° and 150° relative to the conductive film, allowing for efficient band-pass detection without high voltage requirements or three-dimensional obstacles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multi-stage electric field barriers with mesh electrodes are used for band-pass detection, then energy selection capability is improved, but device complexity increases and effective detection is reduced due to nonuniform electric field and three-dimensional obstacles
Solution Approach 1:
The patent extracts the essential function of energy selection from the complex multi-stage mesh electrode system and implements it using a single conductive film with a specific angle arrangement, removing unnecessary complex structures while retaining the band-pass detection capability
Solution Approach 2:
The conductive film acts as an intermediary element that simplifies the energy selection process by creating a uniform electric field barrier at a specific angle, replacing the need for multiple mesh electrodes and complex voltage control systems
2Measurement precision
If mesh electrodes with multiple high voltage power sources are used, then energy band-pass detection is achieved, but ease of operation deteriorates due to requirements for electrostatic withstand voltage and multiple power sources
Solution Approach 1:
The patent removes the requirement for multiple high voltage power sources by using a single conductive film structure that achieves energy selection through its geometric arrangement and single voltage application, greatly simplifying operation
Solution Approach 2:
The patent changes the operational parameters from requiring multiple high voltage power sources with complex voltage control to using a single voltage source applied to a conductive film at a specific angle, making the system easier to operate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables simple and highly efficient band-pass detection of electrons within the desired energy range, effectively filtering out high energy electrons while allowing desired energy electrons to be detected, thereby improving the imaging capabilities of scanning electron microscopes.
Implementation Method 1
The high energy electron is subjected to an energy attenuation by the thin film and transmits through the thin film from a side of the sensing surface of the MCP
Implementation Method 2
an MCP (microchannel plate) detector which is an electron detector
Data Source
AI summary
Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.