Charged Particle Beam Defect Detection with Light Irradiation Netlists

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Solution Overview

Problem

Existing methods for detecting defects in semiconductor devices' electrical characteristics fail to account for interactions between multiple devices, leading to undetected electrical characteristics in certain circuit configurations.

Innovation Solution

A charged particle beam device method that combines electron beam and light irradiation with electronic device circuit information to generate calculation and light irradiation netlists, allowing for the estimation and comparison of irradiation results to detect defects in devices with complex circuit interactions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional electron beam inspection methods are used, then the inspection process is simple, but electrical characteristics of devices with complex circuit interactions cannot be detected

Engineering Contradiction:

Improvedefect detection capabilityVSAvoidinspection system complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines electron beam inspection with light irradiation into a single integrated system. The electron beam device includes both an electron beam source and a light source that can simultaneously or sequentially irradiate the sample, allowing combined observation of secondary electrons and light-induced electrical characteristics changes in one inspection process

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces light as an intermediary substance to activate or modify the electrical characteristics of the sample before electron beam inspection. The light irradiation serves as a mediator that changes the sample's state, enabling detection of electrical characteristics that would otherwise be undetectable by electron beam alone

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If electron beam and light irradiation are combined, then electrical characteristics with device interactions can be detected, but the inspection process becomes more complex

Engineering Contradiction:

Improveelectrical characteristic detection accuracyVSAvoidinspection process simplicity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent implements dynamic control of irradiation sequences, allowing the electron beam and light to be applied in flexible temporal patterns. The system can switch between simultaneous irradiation, sequential irradiation, or alternating irradiation modes depending on the specific inspection requirements, making the complex process adaptable to different scenarios

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent applies light irradiation as a preliminary action before electron beam inspection to pre-activate or pre-modify the sample's electrical characteristics. This preliminary light treatment prepares the sample in a specific state that enables subsequent electron beam detection of electrical characteristics that would otherwise be invisible

Inventive Principle:

Principle #10Preliminary action

3Reliability

If multiple irradiation conditions are tested, then comprehensive defect detection is achieved, but inspection time increases

Engineering Contradiction:

Improvedefect detection comprehensivenessVSAvoidinspection time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent employs periodic irradiation patterns where the electron beam and light are applied in repeated cycles or sequences. By systematically varying irradiation conditions across multiple periodic cycles with different parameters (intensity, duration, timing), the system comprehensively tests various states while maintaining an organized workflow that prevents redundant inspections

Inventive Principle:

Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the measurement of electrical characteristics that cannot be detected by traditional methods, effectively addressing the issue of undetected interactions between multiple devices by updating netlists based on comparison results.

Implementation Method 1

detecting secondary electrons emitted from the sample by the application of the charged particle beam

Methodology Applied

Scientific EffectSecondary electron emission: Electron Impact Desorption

Implementation Method 2

JP 2003-151483 A discloses a method of changing potential contrast by irradiating a sample with light

Methodology Applied

Scientific EffectPhotoconductivity: Photoconductivity

Data Source

PatentUS11631568B2Device defect detection method using a charged particle beam

Publication Date: 2023.04.18 HITACHI HIGH TECH CORP

AI summary

A method of detecting a defect in a device using a charged particle beam includes inputting a charged particle beam condition, a light condition, and electronic device circuit information, controlling a charged particle beam applied to a sample based on the electron beam condition, controlling light applied to the sample based on the light condition, detecting second electrons emitted from the sample by the application of the charged particle beam and the light, and generating a calculation netlist based on the electronic device circuit information, generating a light irradiation netlist based on the calculation netlist and the light condition, estimating a first irradiation result when the charged particle beam and the light are applied to the sample based on the light irradiation netlist and the charged particle beam condition, and comparing the first irradiation result with a second irradiation result when the charged particle beam and the light are actually applied to the sample based on the electron beam condition.